From seymour at snf.stanford.edu Thu Aug 5 15:11:54 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 5 Aug 2004 15:11:54 -0700 Subject: Shutdown tylanpoly SNF 2004-08-05 15:11:51: MFS460 controller locked up Message-ID: From seymour at snf.stanford.edu Thu Aug 5 15:47:58 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 5 Aug 2004 15:47:58 -0700 Subject: Shutdown tylanpoly SNF 2004-08-05 15:11:51: MFS460 controller locked up Message-ID: controller functional again. tube is in pump recipe From lindaw at snf.stanford.edu Fri Aug 6 10:42:53 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 6 Aug 2004 10:42:53 -0700 Subject: Problem tylanpoly SNF 2004-08-06 10:42:51: non-uniform haze Message-ID: This morning I ran AMOR585 (25 min dep) and got a strange non-uniform haze on the frontside of my dsp fused silica. This haze was also visible on the dummy wafers. The haze appears to be worse near the load side of my run of 10 wafers + 1 oxide TW. The non-uniformity is distinctly related to proximity to the boat. The four contact areas of the boat and the centers are clearer than the edges of the wafer. The wafers were loaded in the front boat. The front most dummy wafer has a distinctive clear area where it was close to the cross bar of the front of the boat. The polished backsides already had poly from a previous run, and the backsides look fine. I think maybe something isn't right. Step 35 base pressure was 21.4 and leak pressure (step45) was 35.6 (significantly lower than previously). The dep pressure was steady at 400.5 throughout the deposition. From kbeck02 at earthlink.net Fri Aug 6 10:46:51 2004 From: kbeck02 at earthlink.net (kbeck02 at earthlink.net) Date: Fri, 6 Aug 2004 10:46:51 -0700 Subject: Problem tylanpoly SNF 2004-08-06 10:42:51: non-uniform haze In-Reply-To: <200408061742.i76HgupQ014662@smtp3.Stanford.EDU> References: <200408061742.i76HgupQ014662@smtp3.Stanford.EDU> Message-ID: I ran AMOR4006 last night and the poly looked OK, but it was also not uniform, as noted on the log sheet. I loaded my wafers in the second boat from the front. Sharleen (from home) At 10:42 AM -0700 060804, lindaw at snf.stanford.edu wrote: >This morning I ran AMOR585 (25 min dep) and got a strange >non-uniform haze on the frontside of my dsp fused silica. This haze >was also visible on the dummy wafers. The haze appears to be worse >near the load side of my run of 10 wafers + 1 oxide TW. The >non-uniformity is distinctly related to proximity to the boat. The >four contact areas of the boat and the centers are clearer than the >edges of the wafer. The wafers were loaded in the front boat. The >front most dummy wafer has a distinctive clear area where it was >close to the cross bar of the front of the boat. The polished >backsides already had poly from a previous run, and the backsides >look fine. I think maybe something isn't right. Step 35 base >pressure was 21.4 and leak pressure (step45) was 35.6 (significantly >lower than previously). The dep pressure was steady at 400.5 >throughout the deposition. From maurice at snf.stanford.edu Fri Aug 6 11:10:18 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Aug 2004 11:10:18 -0700 Subject: Shutdown tylanpoly SNF 2004-08-06 11:10:17: Process testing/nonuniformity Message-ID: Process testing after report of nonuniformity From maurice at snf.stanford.edu Fri Aug 6 15:23:39 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Aug 2004 15:23:39 -0700 Subject: Shutdown tylanpoly SNF 2004-08-06 11:10:17: Process testing/nonuniformity Message-ID: Replaced hazy test wafers. Repeated AMOR585 for 00:25:00 . Tested came out good. Expected ~1500A...got 1593. No haze. Uniformity good across wafer. From maurice at snf.stanford.edu Fri Aug 6 15:24:29 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Aug 2004 15:24:29 -0700 Subject: Problem tylanpoly SNF 2004-08-06 10:42:51: non-uniform haze Message-ID: tested ok. From axiu at snf.stanford.edu Sun Aug 8 11:18:58 2004 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Sun, 8 Aug 2004 11:18:58 -0700 Subject: Problem tylanpoly SNF 2004-08-08 11:18:57: tube not pump down Message-ID: before enable it, tube at ready status of polypump with green light. after running it, it stays at 2000. From tberg at snf.stanford.edu Mon Aug 9 07:32:48 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Aug 2004 07:32:48 -0700 Subject: Problem tylanpoly SNF 2004-08-08 11:18:57: tube not pump down Message-ID: Sytem ran after problem report. in pump program now no problem From tberg at snf.stanford.edu Wed Aug 11 08:13:21 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Aug 2004 08:13:21 -0700 Subject: Shutdown tylanpoly SNF 2004-08-11 08:13:20: Pull and clean Message-ID: Scheduled P & C From mdickey at snf.stanford.edu Wed Aug 11 10:43:14 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 11 Aug 2004 10:43:14 -0700 Subject: Comment tylanpoly SNF 2004-08-11 10:43:13: In coat Message-ID: System has been pulled and clean.......currently in coat recipe. Tube will need test after. From maurice at snf.stanford.edu Thu Aug 12 14:29:51 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Aug 2004 14:29:51 -0700 Subject: Comment tylanpoly SNF 2004-08-11 10:43:13: In coat Message-ID: coat complete...testing From maurice at snf.stanford.edu Thu Aug 12 14:30:48 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Aug 2004 14:30:48 -0700 Subject: Shutdown tylanpoly SNF 2004-08-11 08:13:20: Pull and clean Message-ID: pulled, cleaned, coated, tested looks good From yeh at snf.stanford.edu Mon Aug 23 03:33:59 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 23 Aug 2004 03:33:59 -0700 Subject: Problem tylanpoly SNF 2004-08-23 03:33:58: LED display screen not working Message-ID: From mdickey at snf.stanford.edu Mon Aug 23 08:20:31 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 23 Aug 2004 08:20:31 -0700 Subject: Problem tylanpoly SNF 2004-08-23 03:33:58: LED display screen not working Message-ID: Display is now working From lindaw at snf.stanford.edu Wed Aug 25 09:00:17 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 25 Aug 2004 09:00:17 -0700 Subject: Comment tylanpoly SNF 2004-08-25 09:00:17: process pressure fluctuating more than normal Message-ID: The process pressure on the poly tube is fluctuating between 391.7 -411.7. It is usually stable this far (10 min) into the deposition step 70. Tube is running AMOR585 program. From lindaw at snf.stanford.edu Thu Aug 26 09:57:29 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 26 Aug 2004 09:57:29 -0700 Subject: Comment tylanpoly SNF 2004-08-26 09:57:28: pressure fluctuating again Message-ID: in step 35, pressure fluctuating between 31.2 -36.6. From mdickey at snf.stanford.edu Mon Aug 30 14:23:20 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 30 Aug 2004 14:23:20 -0700 Subject: Shutdown tylanpoly SNF 2004-08-30 14:23:19: Quartz change Message-ID: Paddle quartzware needs to be replaced due to previous run turned it black From mdickey at snf.stanford.edu Mon Aug 30 14:44:17 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 30 Aug 2004 14:44:17 -0700 Subject: Comment tylanpoly SNF 2004-08-30 14:44:16: Tube change Message-ID: Down for a pull and clean