Problem tylanpoly SNF 2004-08-06 10:42:51: non-uniform haze

kbeck02 at earthlink.net kbeck02 at earthlink.net
Fri Aug 6 10:46:51 PDT 2004


I ran AMOR4006 last night and the poly looked OK, but it was also not 
uniform, as noted on the
log sheet. I loaded my wafers in the second boat from the front.

Sharleen (from home)

At 10:42 AM -0700 060804, lindaw at snf.stanford.edu wrote:
>This morning I ran AMOR585 (25 min dep) and got a strange 
>non-uniform haze on the frontside of my dsp fused silica. This haze 
>was also visible on the dummy wafers. The haze appears to be worse 
>near the load side of my run of 10 wafers + 1 oxide TW.  The 
>non-uniformity is distinctly related to proximity to the boat.  The 
>four contact areas of the boat and the centers are clearer than the 
>edges of the wafer.  The wafers were loaded in the front boat. The 
>front most dummy wafer has a distinctive clear area where it was 
>close to the cross bar of the front of the boat. The polished 
>backsides already had poly from a previous run, and the backsides 
>look fine.  I think maybe something isn't right.  Step 35 base 
>pressure was 21.4 and leak pressure (step45) was 35.6 (significantly 
>lower than previously). The dep pressure was steady at 400.5 
>throughout the deposition.




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