Shutdown tylanpoly SNF 2004-08-06 11:10:17: Process testing/nonuniformity

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Aug 6 15:23:39 PDT 2004


Replaced hazy test wafers.
Repeated AMOR585 for 00:25:00 .
Tested came out good.  Expected ~1500A...got 1593.  No haze.  Uniformity good across wafer.




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