Comment tylanpoly SNF 2004-08-25 09:00:17: process pressure fluctuating more than normal

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Wed Aug 25 09:00:17 PDT 2004


The process pressure on the poly tube is fluctuating between 391.7 -411.7.  It is usually stable this far (10 min) into the deposition step 70.  Tube is running AMOR585 program.




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