Problem tylanpoly SNF 2004-07-08 16:26:23: Dep rate off, poly 50% too thin AMOR585

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Jul 8 16:26:24 PDT 2004


Instead of getting the usual 1500A for 25 min dep of AMOR585, I only got ~825A for 25 min dep.  Pressures were all ok. Dep time was ok. Anyway to check a run log or something?




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