From tberg at snf.stanford.edu Wed Oct 6 06:21:05 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2004 06:21:05 -0700 Subject: Problem tylanpoly SNF 2004-09-02 11:02:46: Under observation Message-ID: No problems since initial fix. back to green. we are at 17+ From maurice at snf.stanford.edu Wed Oct 6 15:47:13 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Oct 2004 15:47:13 -0700 Subject: Shutdown tylanpoly SNF 2004-10-06 15:47:12: tube aborted during deposition Message-ID: tube aborted during deposition...polyemit program brown film on wafer and boat From kenney at snf.stanford.edu Wed Oct 6 16:05:18 2004 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Wed, 6 Oct 2004 16:05:18 -0700 Subject: Shutdown tylanpoly SNF 2004-10-06 16:05:17: Air Leak? Message-ID: About 15 minutes into the deposition step of the POLYEMIT process there appears to have been a leak. The tube opened up and there was a rust colored coating on the source surface of the wafers. It seems that the leak occurred in the bakck of the tube. The process pressure at the start of the deposition step was 400 mT. There were no problems with during any of the previous runs during the prior evening. From mdickey at snf.stanford.edu Thu Oct 7 13:35:15 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 7 Oct 2004 13:35:15 -0700 Subject: Comment tylanpoly SNF 2004-10-07 13:35:14: In coat Message-ID: System pulled and cleaned. Currently in coat. Needs test after. From seymour at snf.stanford.edu Fri Oct 8 07:53:36 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Oct 2004 07:53:36 -0700 Subject: Comment tylanpoly SNF 2004-10-07 13:35:14: In coat Message-ID: coat completed From seymour at snf.stanford.edu Fri Oct 8 07:54:19 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Oct 2004 07:54:19 -0700 Subject: Shutdown tylanpoly SNF 2004-10-06 16:05:17: Air Leak? Message-ID: Vac Valve closed during deposition From seymour at snf.stanford.edu Fri Oct 8 07:54:47 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Oct 2004 07:54:47 -0700 Subject: Shutdown tylanpoly SNF 2004-10-06 15:47:12: tube aborted during deposition Message-ID: Vac valve closed during deposition From seymour at snf.stanford.edu Fri Oct 8 07:55:31 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Oct 2004 07:55:31 -0700 Subject: Problem tylanpoly SNF 2004-10-08 07:55:31: under observation Message-ID: From seymour at snf.stanford.edu Fri Oct 8 07:56:03 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Oct 2004 07:56:03 -0700 Subject: Shutdown tylanpoly SNF 2004-10-08 07:56:03: needs testing after pull and clean Message-ID: From maurice at snf.stanford.edu Fri Oct 8 11:59:03 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Oct 2004 11:59:03 -0700 Subject: Shutdown tylanpoly SNF 2004-10-08 07:56:03: needs testing after pull and clean Message-ID: test complete. Dep rate and uniformity good. -m From maurice at snf.stanford.edu Fri Oct 8 12:00:48 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Oct 2004 12:00:48 -0700 Subject: Shutdown tylanpoly SNF 2004-10-08 12:00:47: MFS alarm gatevalve interlock Message-ID: mfs alarm in step 10 of pump program From seymour at snf.stanford.edu Fri Oct 8 14:45:41 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Oct 2004 14:45:41 -0700 Subject: Shutdown tylanpoly SNF 2004-10-08 12:00:47: MFS alarm gatevalve interlock Message-ID: adjusted loader flag for door closed. pumped down and leak checked. tube is up to run.