Shutdown tylanpoly SNF 2004-10-06 16:05:17: Air Leak?

kenney at snf.stanford.edu kenney at snf.stanford.edu
Wed Oct 6 16:05:18 PDT 2004


About 15 minutes into the deposition step of the POLYEMIT
process there appears to have been a leak. The tube opened
up and there was a rust colored coating on the source
surface of the wafers. It seems that the leak occurred in the bakck of the tube. The process pressure at the start of the deposition step was 400 mT. There were no problems with during any of the previous runs during the prior evening.




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