From peichen at stanford.edu Wed Aug 3 16:08:35 2005 From: peichen at stanford.edu (Pei-Chen Su) Date: Wed, 3 Aug 2005 16:08:35 -0700 Subject: Tylanpoly stress information Message-ID: Dear friends, I'm planning to do a 1-3um of Low Stress poly deposigion on 300nm silicon nitride. I'd like to know if any of you have the experience or info about the stress in the poly corresponding to CIS recipes? For example the strain, tension/compression, annealing condition for removing the stress, etc. Any suggestion is appreciated! Best regards, Pei-Chen From king at snf.stanford.edu Sat Aug 6 13:38:16 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 6 Aug 2005 13:38:16 -0700 Subject: Shutdown tylanpoly SNF 2005-08-06 13:38:15: Tylan Poly N2 MFC Failure Message-ID: N2 purge MFC flowing 5000 and alarming. From seymour at snf.stanford.edu Mon Aug 8 14:47:25 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Aug 2005 14:47:25 -0700 Subject: Shutdown tylanpoly SNF 2005-08-06 13:38:15: Tylan Poly N2 MFC Failure Message-ID: Replaced channel 4 opamp and zero pot. set up all cannel zero pots and did a auto zero routine on the MFS460. Ran system in manual, sih4 set to 31 sccm flow was same, H2 set to 100 sccm, flow same, and n2 purge setr to 453 and flow matched setpoint. I put the system in auto and started pump recipe. From maurice at snf.stanford.edu Wed Aug 10 11:25:44 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Aug 2005 11:25:44 -0700 Subject: Comment tylanpoly SNF 2005-08-10 11:25:43: added 3 dummy wafers Message-ID: replaced 3 missing dummies From tberg at snf.stanford.edu Mon Aug 15 06:14:28 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2005 06:14:28 -0700 Subject: Shutdown tylanpoly SNF 2005-08-15 06:14:27: Shutdown for bank 4 move Message-ID: From seymour at snf.stanford.edu Wed Aug 24 14:14:29 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 24 Aug 2005 14:14:29 -0700 Subject: Comment tylanpoly SNF 2005-08-10 11:25:43: added 3 dummy wafers Message-ID: noted From seymour at snf.stanford.edu Wed Aug 24 14:15:12 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 24 Aug 2005 14:15:12 -0700 Subject: Shutdown tylanpoly SNF 2005-08-15 06:14:27: Shutdown for bank 4 move Message-ID: gasses turned on and flowed to setpoint. From seymour at snf.stanford.edu Wed Aug 24 14:15:30 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 24 Aug 2005 14:15:30 -0700 Subject: Problem tylanpoly SNF 2005-08-24 14:15:29: needs test Message-ID: From maurice at snf.stanford.edu Thu Aug 25 14:06:59 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Aug 2005 14:06:59 -0700 Subject: Comment tylanpoly SNF 2005-08-25 14:06:58: Dep rate low Message-ID: expected 2000Ang rec'ed ~500 We will repeat test From maurice at snf.stanford.edu Thu Aug 25 16:22:32 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Aug 2005 16:22:32 -0700 Subject: Shutdown tylanpoly SNF 2005-08-25 16:22:31: low dep rate Message-ID: polyemit 00:15:00 expected 1800 ang 1st test 550ang 2nd test 609 ang Can gas lines be purged more and then we can repeat test From maurice at snf.stanford.edu Thu Aug 25 16:22:47 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Aug 2005 16:22:47 -0700 Subject: Comment tylanpoly SNF 2005-08-25 14:06:58: Dep rate low Message-ID: logged From maurice at snf.stanford.edu Thu Aug 25 16:22:59 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Aug 2005 16:22:59 -0700 Subject: Problem tylanpoly SNF 2005-08-24 14:15:29: needs test Message-ID: logged From maurice at snf.stanford.edu Fri Aug 26 13:35:18 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Aug 2005 13:35:18 -0700 Subject: Comment tylanpoly SNF 2005-08-26 13:35:17: dep rate low Message-ID: polyemit 00:15:00 expected 1800 ang 3rd test ~650ang From maurice at snf.stanford.edu Fri Aug 26 14:31:20 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Aug 2005 14:31:20 -0700 Subject: Shutdown tylanpoly SNF 2005-08-25 16:22:31: low dep rate Message-ID: logged From maurice at snf.stanford.edu Fri Aug 26 14:31:50 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Aug 2005 14:31:50 -0700 Subject: Problem tylanpoly SNF 2005-08-26 14:31:49: low rep rate Message-ID: From lindaw at snf.stanford.edu Sun Aug 28 15:01:09 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 28 Aug 2005 15:01:09 -0700 Subject: Comment tylanpoly SNF 2005-08-28 15:01:09: Low dep rate for AMOR585 Message-ID: Ran AMOR585 25 min. AmSi thickness 965 +-3 Angstroms. Target was 1500 A. Dep rate 38.6 A/min. Film looks visually good otherwise. From maurice at snf.stanford.edu Mon Aug 29 12:06:30 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Aug 2005 12:06:30 -0700 Subject: Shutdown tylanpoly SNF 2005-08-29 12:06:29: replacing MFC Message-ID: From tberg at snf.stanford.edu Mon Aug 29 13:27:34 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Aug 2005 13:27:34 -0700 Subject: Comment tylanpoly SNF 2005-08-26 13:35:17: dep rate low Message-ID: noted From seymour at snf.stanford.edu Mon Aug 29 14:34:39 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 29 Aug 2005 14:34:39 -0700 Subject: Shutdown tylanpoly SNF 2005-08-29 12:06:29: replacing MFC Message-ID: replaced sensor and control valve. adjusted all zeros , adjusted control valve to allow full flow of 200 sccm. checked silane flow at 100, 200, and 130 sccm. control good . tube pressure looked good with 100 sccm silane flow. comparable to tystar. checked all gas flows for control and stability. a test is being started at this time. From seymour at snf.stanford.edu Mon Aug 29 14:35:14 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 29 Aug 2005 14:35:14 -0700 Subject: Comment tylanpoly SNF 2005-08-28 15:01:09: Low dep rate for AMOR585 Message-ID: silane flowing at correct sccm now From seymour at snf.stanford.edu Mon Aug 29 14:37:06 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 29 Aug 2005 14:37:06 -0700 Subject: Problem tylanpoly SNF 2005-08-26 14:31:49: low rep rate Message-ID: replaced sensor and control valve. flow looks good and tube pressure looked good. From maurice at snf.stanford.edu Mon Aug 29 14:44:16 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Aug 2005 14:44:16 -0700 Subject: Problem tylanpoly SNF 2005-08-29 14:44:15: testing after MFC work Message-ID: Process testing From maurice at snf.stanford.edu Mon Aug 29 17:07:12 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Aug 2005 17:07:12 -0700 Subject: Problem tylanpoly SNF 2005-08-29 14:44:15: testing after MFC work Message-ID: dep rate test good