Tylanpoly stress information

Pei-Chen Su peichen at stanford.edu
Wed Aug 3 16:08:35 PDT 2005

Dear friends,

I'm planning to do a 1-3um of Low Stress poly deposigion on 300nm silicon
nitride. I'd like to know if any of you have the experience or info about
the stress in the poly corresponding to CIS recipes? For example the strain,
tension/compression, annealing condition for removing the stress, etc.

Any suggestion is appreciated!

Best regards,

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