Shutdown tylanpoly SNF 2005-08-06 13:38:15: Tylan Poly N2 MFC Failure

seymour at seymour at
Mon Aug 8 14:47:25 PDT 2005

Replaced channel 4 opamp and zero pot. set up all cannel zero pots and did a auto zero routine on the MFS460. Ran system in manual, sih4 set to 31 sccm flow was same, H2 set to 100 sccm, flow same, and n2 purge setr to 453 and flow matched setpoint. I put the system in auto and started pump recipe. 

More information about the tylanpoly-pcs mailing list