Shutdown tylanpoly SNF 2005-08-06 13:38:15: Tylan Poly N2 MFC Failure

[seymour at snf.stanford.edu]

Replaced channel 4 opamp and zero pot. set up all cannel zero pots and did a auto zero routine on the MFS460. Ran system in manual, sih4 set to 31 sccm flow was same, H2 set to 100 sccm, flow same, and n2 purge setr to 453 and flow matched setpoint. I put the system in auto and started pump recipe.