Comment tylanpoly SNF 2005-08-28 15:01:09: Low dep rate for AMOR585

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sun Aug 28 15:01:09 PDT 2005


Ran AMOR585 25 min. AmSi thickness 965 +-3 Angstroms.  Target was 1500 A.  Dep rate 38.6 A/min. Film looks visually good otherwise. 




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