Shutdown tylanpoly SNF 2005-08-29 12:06:29: replacing MFC

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Aug 29 14:34:39 PDT 2005


replaced sensor and control valve. adjusted all zeros , adjusted control valve to allow full flow of 200 sccm. checked silane flow at 100, 200, and 130 sccm. control good . tube pressure looked good with 100 sccm silane flow. comparable to tystar. checked all gas flows for control and stability. 
a test is being started at this time.




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