Comment tylanpoly SNF 2005-08-28 15:01:09: Low dep rate for AMOR585
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Mon Aug 29 14:35:14 PDT 2005
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Comment tylanpoly SNF 2005-08-28 15:01:09: Low dep rate for AMOR585
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Shutdown tylanpoly SNF 2005-08-29 12:06:29: replacing MFC
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silane flowing at correct sccm now
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Comment tylanpoly SNF 2005-08-28 15:01:09: Low dep rate for AMOR585
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Shutdown tylanpoly SNF 2005-08-29 12:06:29: replacing MFC
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