From iwjung at snf.stanford.edu Thu Dec 1 02:58:48 2005 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Thu, 1 Dec 2005 02:58:48 -0800 Subject: Shutdown tylanpoly SNF 2005-12-01 02:58:48: browning of wafers and boats and tube Message-ID: When I opened the tube I found the tube with burnt-like brown substance on the boats, tube and dummy wafer edges. I ran a test run (polyemit 40 min) with some additional clean dummies and now the brown stuff is on all over the wafers and on more areas of the boat. From maurice at snf.stanford.edu Thu Dec 1 15:40:43 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Dec 2005 15:40:43 -0800 Subject: Comment tylanpoly SNF 2005-12-01 15:40:42: testing/after pull Message-ID: User found tube brown in color Tube pulled, pumping ok, temps ok, flows ok running a coat and test From seymour at snf.stanford.edu Mon Dec 5 15:10:54 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 5 Dec 2005 15:10:54 -0800 Subject: Comment tylanpoly SNF 2005-12-01 15:40:42: testing/after pull Message-ID: test aborted From seymour at snf.stanford.edu Mon Dec 5 15:13:20 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 5 Dec 2005 15:13:20 -0800 Subject: Shutdown tylanpoly SNF 2005-12-01 02:58:48: browning of wafers and boats and tube Message-ID: went through the silane MFC cleaning and testing. reassembled and tested. With the setpoints used in recipe polyemit I had 136 sccm silane 110 H2 and process pressure was 215 mTorr. System need a test From seymour at snf.stanford.edu Mon Dec 5 15:13:47 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 5 Dec 2005 15:13:47 -0800 Subject: Shutdown tylanpoly SNF 2005-12-05 15:13:45: needs test after repair. Message-ID: From maurice at snf.stanford.edu Mon Dec 5 15:59:07 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 5 Dec 2005 15:59:07 -0800 Subject: Shutdown tylanpoly SNF 2005-12-05 15:59:07: testing Message-ID: running poly test From maurice at snf.stanford.edu Mon Dec 5 16:35:27 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 5 Dec 2005 16:35:27 -0800 Subject: Comment tylanpoly SNF 2005-12-05 16:35:26: BPSG tests/coat Message-ID: test running...will unload Tues morning From maurice at snf.stanford.edu Tue Dec 6 10:12:14 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Dec 2005 10:12:14 -0800 Subject: Comment tylanpoly SNF 2005-12-06 10:12:13: poly test Message-ID: Polyemit recipe for 15 min...expected 2000Ang deposition gave 1530Ang From maurice at snf.stanford.edu Tue Dec 6 10:12:30 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Dec 2005 10:12:30 -0800 Subject: Comment tylanpoly SNF 2005-12-05 16:35:26: BPSG tests/coat Message-ID: logged From maurice at snf.stanford.edu Tue Dec 6 10:12:52 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Dec 2005 10:12:52 -0800 Subject: Shutdown tylanpoly SNF 2005-12-05 15:13:45: needs test after repair. Message-ID: logged From lindaw at snf.stanford.edu Tue Dec 6 12:36:21 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 6 Dec 2005 12:36:21 -0800 Subject: Comment tylanpoly SNF 2005-12-06 12:36:21: AMOR585 test dep rate Message-ID: New dep rate for 10 min test dep 56.6A/min. Old rate was 65.2A/min. From maurice at snf.stanford.edu Tue Dec 6 13:50:33 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Dec 2005 13:50:33 -0800 Subject: Shutdown tylanpoly SNF 2005-12-05 15:59:07: testing Message-ID: The tylan poly deposition rate is currently 25% less than it was last week. It may get closer to normal as the tube is getting coated. We suggest you do a test run before a critical deposition. From maurice at snf.stanford.edu Tue Dec 6 13:51:11 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Dec 2005 13:51:11 -0800 Subject: Problem tylanpoly SNF 2005-12-06 13:51:11: Poly dep rate low Message-ID: The tylan poly deposition rate is currently 25% less than it was last week. It may get closer to normal as the tube is getting coated. We suggest you do a test run before a critical deposition. From maurice at snf.stanford.edu Tue Dec 6 13:51:22 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Dec 2005 13:51:22 -0800 Subject: Comment tylanpoly SNF 2005-12-06 10:12:13: poly test Message-ID: logged From lindaw at snf.stanford.edu Tue Dec 6 16:44:45 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 6 Dec 2005 16:44:45 -0800 Subject: Comment tylanpoly SNF 2005-12-06 16:44:44: dep rate closer to normal Message-ID: I ran my device wafers AMOR585 for 26 min and got 1654 +-8A. New rate 63.6A/min. From maurice at snf.stanford.edu Thu Dec 8 09:28:07 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 8 Dec 2005 09:28:07 -0800 Subject: Comment tylanpoly SNF 2005-12-06 12:36:21: AMOR585 test dep rate Message-ID: dep rate back to normal From maurice at snf.stanford.edu Thu Dec 8 09:29:02 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 8 Dec 2005 09:29:02 -0800 Subject: Problem tylanpoly SNF 2005-12-06 13:51:11: Poly dep rate low Message-ID: dep rate back to normal for amor585 From maurice at snf.stanford.edu Thu Dec 8 09:29:14 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 8 Dec 2005 09:29:14 -0800 Subject: Comment tylanpoly SNF 2005-12-06 16:44:44: dep rate closer to normal Message-ID: logged From kimsora at snf.stanford.edu Thu Dec 15 13:25:00 2005 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Thu, 15 Dec 2005 13:25:00 -0800 Subject: Problem tylanpoly SNF 2005-12-15 13:24:59: Boat stops when it goes into the furnace. Message-ID: Need to push in manually. Deposition seems okay... but during deposition, the pressure is somewhat fluctuating.