From axiu at snf.stanford.edu Thu Feb 10 09:16:21 2005 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Thu, 10 Feb 2005 09:16:21 -0800 Subject: Problem tylanpoly SNF 2005-02-10 09:16:16: No deposition Message-ID: From axiu at snf.stanford.edu Thu Feb 10 09:16:33 2005 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Thu, 10 Feb 2005 09:16:33 -0800 Subject: Shutdown tylanpoly SNF 2005-02-10 09:16:28: Message-ID: From seymour at snf.stanford.edu Thu Feb 10 09:30:18 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 10 Feb 2005 09:30:18 -0800 Subject: Shutdown tylanpoly SNF 2005-02-10 09:16:28: Message-ID: checked MFS460 for proper operation and MFC zero's. Did auto zero routine on MFS460. In manual I ran 100 sccm of silane with no problems. Gave tool back to user. From seymour at snf.stanford.edu Thu Feb 10 09:31:50 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 10 Feb 2005 09:31:50 -0800 Subject: Problem tylanpoly SNF 2005-02-10 09:16:16: No deposition Message-ID: Cannot find a problem wi9th tool silane flow in manual. Will observe in auto.l; From maurice at snf.stanford.edu Thu Feb 10 11:06:13 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Feb 2005 11:06:13 -0800 Subject: Shutdown tylanpoly SNF 2005-02-10 11:06:12: tube cold Message-ID: Tycom reads temp 400 in all zones but Remote Operating Panel says 24. Tube is cold to the touch. From axiu at snf.stanford.edu Sun Feb 13 00:07:36 2005 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Sun, 13 Feb 2005 00:07:36 -0800 Subject: Problem tylanpoly SNF 2005-02-13 00:07:35: Message-ID: From maurice at snf.stanford.edu Mon Feb 14 13:24:51 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 Feb 2005 13:24:51 -0800 Subject: Problem tylanpoly SNF 2005-02-13 00:07:35: Message-ID: