From crichter at snf.stanford.edu Wed Jun 8 19:14:10 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Wed, 8 Jun 2005 19:14:10 -0700 Subject: Problem tylanpoly SNF 2005-06-08 19:14:09: deposition contaminated?? Message-ID: I ran the AMOR585 for 1.5 hours and all wafers had a matte finish when my wafers are all double side polished. The texture is rough and granular...what happened?? From rwoo at snf.stanford.edu Wed Jun 8 23:47:12 2005 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Wed, 8 Jun 2005 23:47:12 -0700 Subject: Comment tylanpoly SNF 2005-06-08 23:47:11: test run of amor585 25min looked OK Message-ID: I did a test run of amor585 for 25min and the deposition appeared to be normal. However, there is a problem with the center thermocouple. At the end of the run, it was reading big "B" and took a long time to cool down to 600 deg. Now the thermocouple does not have a B, but it reads a constant 400.0 deg even though the surrounding zones are at 600 deg. From mdickey at snf.stanford.edu Thu Jun 9 06:32:22 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 9 Jun 2005 06:32:22 -0700 Subject: Comment tylanpoly SNF 2005-05-19 06:43:47: Tube pull Message-ID: noted From mdickey at snf.stanford.edu Thu Jun 9 06:32:31 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 9 Jun 2005 06:32:31 -0700 Subject: Comment tylanpoly SNF 2005-05-19 13:57:25: Tube replaced Message-ID: noted From mdickey at snf.stanford.edu Thu Jun 9 06:46:26 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 9 Jun 2005 06:46:26 -0700 Subject: Comment tylanpoly SNF 2005-06-08 23:47:11: test run of amor585 25min looked OK Message-ID: Retightened profile center zone t.c. connection From lindaw at snf.stanford.edu Thu Jun 9 13:08:01 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 9 Jun 2005 13:08:01 -0700 Subject: Comment tylanpoly SNF 2005-06-09 13:07:47: Ran AMOR585 25 min, wafers look fine. Message-ID: From tberg at snf.stanford.edu Mon Jun 13 06:24:18 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Jun 2005 06:24:18 -0700 Subject: Problem tylanpoly SNF 2005-06-08 19:14:09: deposition contaminated?? Message-ID: Several other runs with no problems From tberg at snf.stanford.edu Mon Jun 13 06:24:31 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Jun 2005 06:24:31 -0700 Subject: Comment tylanpoly SNF 2005-06-09 13:07:47: Ran AMOR585 25 min, wafers look fine. Message-ID: Noted From lindaw at snf.stanford.edu Sat Jun 18 11:31:38 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 18 Jun 2005 11:31:38 -0700 Subject: Problem tylanpoly SNF 2005-06-18 11:31:38: didn't pass leak check at step 35 of AMOR585 Message-ID: pressure did not get below 450. Run aborted. From lindaw at snf.stanford.edu Sat Jun 18 11:52:26 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 18 Jun 2005 11:52:26 -0700 Subject: Comment tylanpoly SNF 2005-06-18 11:52:26: Polypump step 20 pumps down to 16.1-32.6 Message-ID: step 25 holding at 55.6 - 67.3. I don't know if this is the normal pressure for polypump step 25. From lindaw at snf.stanford.edu Mon Jun 20 13:07:11 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 20 Jun 2005 13:07:11 -0700 Subject: Comment tylanpoly SNF 2005-06-20 13:07:10: ran a test run, pump down ok, film looks good. Message-ID: From maurice at snf.stanford.edu Mon Jun 20 14:00:31 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 20 Jun 2005 14:00:31 -0700 Subject: Comment tylanpoly SNF 2005-06-20 13:07:10: ran a test run, pump down ok, film looks good. Message-ID: logged From maurice at snf.stanford.edu Mon Jun 20 14:00:42 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 20 Jun 2005 14:00:42 -0700 Subject: Comment tylanpoly SNF 2005-06-18 11:52:26: Polypump step 20 pumps down to 16.1-32.6 Message-ID: logged From maurice at snf.stanford.edu Mon Jun 20 14:00:54 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 20 Jun 2005 14:00:54 -0700 Subject: Problem tylanpoly SNF 2005-06-18 11:31:38: didn't pass leak check at step 35 of AMOR585 Message-ID: logged