From jrjain at snf.stanford.edu  Sun Oct 16 22:12:51 2005
From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu)
Date: Sun, 16 Oct 2005 22:12:51 -0700
Subject: Problem tylanpoly SNF 2005-10-16 22:12:51: Large Process Pressure Variation
Message-ID: <mailman.405.1356283792.5060.tylanpoly-pcs@snf.stanford.edu>

Process Pressure varied between ~327-400 throughout 01:50:00 AMOR525 deposition.  



From tberg at snf.stanford.edu  Tue Oct 25 07:49:49 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 25 Oct 2005 07:49:49 -0700
Subject: Problem tylanpoly SNF 2005-10-16 22:12:51: Large Process Pressure Variation
Message-ID: <mailman.406.1356283792.5060.tylanpoly-pcs@snf.stanford.edu>

AdjustedPIDs



From lindaw at snf.stanford.edu  Sun Oct 30 13:59:11 2005
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Sun, 30 Oct 2005 13:59:11 -0800
Subject: Comment tylanpoly SNF 2005-10-30 13:59:10: The clean vacuum wand tip is slightly bent.
Message-ID: <mailman.407.1356283792.5060.tylanpoly-pcs@snf.stanford.edu>