From maurice at snf.stanford.edu Wed Sep 14 14:51:41 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 14 Sep 2005 14:51:41 -0700 Subject: Problem tylanpoly SNF 2005-09-14 14:51:39: MFS error during run Message-ID: no SiH4 or H2 flow in deposition step From maurice at snf.stanford.edu Wed Sep 14 15:05:43 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 14 Sep 2005 15:05:43 -0700 Subject: Shutdown tylanpoly SNF 2005-09-14 15:05:40: Gas flows not stable Message-ID: Aborted run From maurice at snf.stanford.edu Wed Sep 14 15:53:45 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 14 Sep 2005 15:53:45 -0700 Subject: Problem tylanpoly SNF 2005-09-14 14:51:39: MFS error during run Message-ID: logged From seymour at snf.stanford.edu Wed Sep 14 16:05:57 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Sep 2005 16:05:57 -0700 Subject: Shutdown tylanpoly SNF 2005-09-14 15:05:40: Gas flows not stable Message-ID: adjusted all zero's on MFS460, checked H2 and Silane flows and they were good. Repaired broken wire on N2Purge control valve. returning tool to process. From seymour at snf.stanford.edu Wed Sep 14 16:06:19 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Sep 2005 16:06:19 -0700 Subject: Problem tylanpoly SNF 2005-09-14 16:06:15: needs test after repair Message-ID: From yzhu at snf.stanford.edu Thu Sep 15 13:19:47 2005 From: yzhu at snf.stanford.edu (yzhu at snf.stanford.edu) Date: Thu, 15 Sep 2005 13:19:47 -0700 Subject: Problem tylanpoly SNF 2005-09-15 13:19:46: after unloading the wafer, MFC alarm Message-ID: I run the recipe Poly600, recipe finished successfully. After I unload the wafer, boat in, MFC alarm From lindaw at snf.stanford.edu Sat Sep 17 12:11:48 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 17 Sep 2005 12:11:48 -0700 Subject: Problem tylanpoly SNF 2005-09-17 12:11:47: AMOR585 program won't compile CRC error Message-ID: I tried to load amor585 into tube 9, and the program won't compile. It just says CRC error. Ran polypump, which was already loaded. From tberg at snf.stanford.edu Mon Sep 19 06:39:32 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Sep 2005 06:39:32 -0700 Subject: Problem tylanpoly SNF 2005-09-15 13:19:46: after unloading the wafer, MFC alarm Message-ID: Zeroed monoblock From tberg at snf.stanford.edu Mon Sep 19 06:40:23 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Sep 2005 06:40:23 -0700 Subject: Problem tylanpoly SNF 2005-09-17 12:11:47: AMOR585 program won't compile CRC error Message-ID: Loaded Amor585 twice with no problems From tberg at snf.stanford.edu Thu Sep 22 06:24:31 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Sep 2005 06:24:31 -0700 Subject: Problem tylanpoly SNF 2005-09-14 16:06:15: needs test after repair Message-ID: has run Fine From mdickey at snf.stanford.edu Tue Sep 27 06:05:57 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 27 Sep 2005 06:05:57 -0700 Subject: Shutdown tylanpoly SNF 2005-09-27 06:05:56: tube pull Message-ID: down for pull and clean From maurice at snf.stanford.edu Tue Sep 27 16:04:23 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 27 Sep 2005 16:04:23 -0700 Subject: Shutdown tylanpoly SNF 2005-09-27 06:05:56: tube pull Message-ID: pulled, cleaned, coated and tested. Green light