Shutdown tylanpoly SNF 2005-09-14 15:05:40: Gas flows not stable

seymour at snf.stanford.edu seymour at snf.stanford.edu
Wed Sep 14 16:05:57 PDT 2005


adjusted all zero's on MFS460, checked H2 and Silane flows  and they were good. Repaired broken wire on N2Purge control valve. returning tool to process.




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