Problem tylanpoly SNF 2005-09-15 13:19:46: after unloading the wafer, MFC alarm

yzhu at snf.stanford.edu yzhu at snf.stanford.edu
Thu Sep 15 13:19:47 PDT 2005


I run the recipe Poly600, recipe finished successfully. After I unload the wafer, boat in, MFC alarm




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