From sanjah at snf.stanford.edu Fri Apr 14 19:13:22 2006 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Fri, 14 Apr 2006 19:13:22 -0700 Subject: Problem tylanpoly SNF 2006-04-14 19:13:16: clean vacuum wand is broken Message-ID: From mdickey at snf.stanford.edu Mon Apr 17 06:44:06 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 17 Apr 2006 06:44:06 -0700 Subject: Problem tylanpoly SNF 2006-04-14 19:13:16: clean vacuum wand is broken Message-ID: tip replaced From mdickey at snf.stanford.edu Thu Apr 20 06:02:12 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 20 Apr 2006 06:02:12 -0700 Subject: Shutdown tylanpoly SNF 2006-04-20 06:02:12: Tube pull Message-ID: Down for pull and clean From maurice at snf.stanford.edu Thu Apr 20 17:57:44 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Apr 2006 17:57:44 -0700 Subject: Shutdown tylanpoly SNF 2006-04-20 06:02:12: Tube pull Message-ID: pulled cleaned coated and tested deprate 114a/min across wafer uniformity 1.4% system up From maurice at snf.stanford.edu Thu Apr 20 17:58:14 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Apr 2006 17:58:14 -0700 Subject: Problem tylanpoly SNF 2006-02-25 05:20:09: Uniformity is so bad. Message-ID: logged From yeh at snf.stanford.edu Fri Apr 21 01:17:52 2006 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 21 Apr 2006 01:17:52 -0700 Subject: Comment tylanpoly SNF 2006-04-21 01:17:52: tube not pumped down Message-ID: found tylanpoly to be loaded with POLYCOAT recipe. it was in ready mode. tube was at atmospheric pressure. From yeh at snf.stanford.edu Fri Apr 21 01:46:37 2006 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 21 Apr 2006 01:46:37 -0700 Subject: Problem tylanpoly SNF 2006-04-21 01:46:36: recipe does not start Message-ID: stuck at step 10. noticed door interlock never turned on even after ~10 minutes after door closed. before my wafers were loaded, found tube at READY with "POLYCOAT" recipe loaded rather than "POLYPUMP". therefore, tube was not pumped down and left at atmospheric pressure for hours.. From yeh at snf.stanford.edu Fri Apr 21 01:47:11 2006 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 21 Apr 2006 01:47:11 -0700 Subject: Shutdown tylanpoly SNF 2006-04-21 01:47:11: see problem report regarding door interlock not ON Message-ID: From mdickey at snf.stanford.edu Fri Apr 21 06:40:53 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 21 Apr 2006 06:40:53 -0700 Subject: Shutdown tylanpoly SNF 2006-04-21 01:47:11: see problem report regarding door interlock not ON Message-ID: Door flag needed adjustment...ready for use From mdickey at snf.stanford.edu Fri Apr 21 06:41:07 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 21 Apr 2006 06:41:07 -0700 Subject: Problem tylanpoly SNF 2006-04-21 01:46:36: recipe does not start Message-ID: flag adjusted From mdickey at snf.stanford.edu Fri Apr 21 06:41:14 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 21 Apr 2006 06:41:14 -0700 Subject: Comment tylanpoly SNF 2006-04-21 01:17:52: tube not pumped down Message-ID: flag adjusted