Problem tylanpoly SNF 2006-04-21 01:46:36: recipe does not start

yeh at snf.stanford.edu yeh at snf.stanford.edu
Fri Apr 21 01:46:37 PDT 2006


stuck at step 10.  noticed door interlock never turned on even after ~10 minutes after door closed.  
before my wafers were loaded, found tube at READY with "POLYCOAT" recipe loaded rather than "POLYPUMP".  therefore, tube was not pumped down and left at atmospheric pressure for hours..




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