From jasmine at snf.stanford.edu Thu Feb 9 09:39:01 2006 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Thu, 9 Feb 2006 09:39:01 -0800 Subject: Problem tylanpoly SNF 2006-02-09 09:39:01: furnace tube didn't want to close Message-ID: When I had finished my run and unloaded my wafers I pressed ALM ACK to close the tube. The tube starting moving but stopped midway and I hen had to manually close it.. From tberg at snf.stanford.edu Thu Feb 9 10:30:51 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:30:51 -0800 Subject: Comment tylanpoly SNF 2006-01-03 12:58:06: gases purged out Message-ID: noted From tberg at snf.stanford.edu Thu Feb 9 10:30:54 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:30:54 -0800 Subject: Comment tylanpoly SNF 2006-01-03 12:58:06: gases purged out Message-ID: noted From tberg at snf.stanford.edu Thu Feb 9 10:30:56 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:30:56 -0800 Subject: Comment tylanpoly SNF 2006-01-04 13:40:57: 2nd test thin Message-ID: old news From tberg at snf.stanford.edu Thu Feb 9 10:31:00 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:31:00 -0800 Subject: Comment tylanpoly SNF 2006-01-04 16:47:47: 3rd test thin Message-ID: its good now From tberg at snf.stanford.edu Thu Feb 9 10:31:21 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:31:21 -0800 Subject: Comment tylanpoly SNF 2006-01-05 06:29:56: Running dummy run Message-ID: real;ly its good now From tberg at snf.stanford.edu Thu Feb 9 10:31:31 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:31:31 -0800 Subject: Comment tylanpoly SNF 2006-01-05 16:00:00: 4th test thin Message-ID: noted From tberg at snf.stanford.edu Thu Feb 9 10:31:49 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:31:49 -0800 Subject: Comment tylanpoly SNF 2006-01-05 16:18:43: running 2hr dummy run Message-ID: noted From tberg at snf.stanford.edu Thu Feb 9 10:32:02 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:32:02 -0800 Subject: Comment tylanpoly SNF 2006-01-06 09:53:22: 5th test thin Message-ID: noted From seymour at snf.stanford.edu Thu Feb 9 11:16:50 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Feb 2006 11:16:50 -0800 Subject: Comment tylanpoly SNF 2006-02-09 11:16:49: tube close problem Message-ID: I vented the tube, loaded polyemit and started it twice and when fully out pushed alarm ack sending it back it. No stopping found on the loads. Leaving tube in yellow status at this time. From axiu at snf.stanford.edu Tue Feb 14 16:10:54 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Tue, 14 Feb 2006 16:10:54 -0800 Subject: Problem tylanpoly SNF 2006-02-14 16:10:53: stop at step 10 Message-ID: From yzhu at snf.stanford.edu Wed Feb 15 23:52:44 2006 From: yzhu at snf.stanford.edu (yzhu at snf.stanford.edu) Date: Wed, 15 Feb 2006 23:52:44 -0800 Subject: Shutdown tylanpoly SNF 2006-02-15 23:52:43: stuck problem Message-ID: the tube can't be moved out/in either manully or automatically. Seems that something is stuck inside the tube. From mdickey at snf.stanford.edu Thu Feb 16 08:06:58 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Feb 2006 08:06:58 -0800 Subject: Shutdown tylanpoly SNF 2006-02-15 23:52:43: stuck problem Message-ID: Replaced bearings, system is ready for use From mdickey at snf.stanford.edu Thu Feb 16 08:07:11 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Feb 2006 08:07:11 -0800 Subject: Problem tylanpoly SNF 2006-02-14 16:10:53: stop at step 10 Message-ID: noted From mdickey at snf.stanford.edu Thu Feb 16 08:07:22 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Feb 2006 08:07:22 -0800 Subject: Comment tylanpoly SNF 2006-02-09 11:16:49: tube close problem Message-ID: noted From mdickey at snf.stanford.edu Thu Feb 16 08:07:39 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Feb 2006 08:07:39 -0800 Subject: Problem tylanpoly SNF 2006-02-09 09:39:01: furnace tube didn't want to close Message-ID: problem fixed From axiu at snf.stanford.edu Thu Feb 16 08:44:12 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Thu, 16 Feb 2006 08:44:12 -0800 Subject: Problem tylanpoly SNF 2006-02-16 08:44:11: tup not in Message-ID: From axiu at snf.stanford.edu Thu Feb 16 09:33:20 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Thu, 16 Feb 2006 09:33:20 -0800 Subject: Problem tylanpoly SNF 2006-02-16 09:33:19: didn't pass leak check Message-ID: From mdickey at snf.stanford.edu Thu Feb 16 14:34:53 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Feb 2006 14:34:53 -0800 Subject: Comment tylanpoly SNF 2006-02-16 14:34:52: tube pull Message-ID: Tube has been pulled and cleaned. Needs coat and test From mdickey at snf.stanford.edu Fri Feb 17 11:50:40 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 17 Feb 2006 11:50:40 -0800 Subject: Comment tylanpoly SNF 2006-02-16 14:34:52: tube pull Message-ID: done From mdickey at snf.stanford.edu Fri Feb 17 11:50:53 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 17 Feb 2006 11:50:53 -0800 Subject: Problem tylanpoly SNF 2006-02-16 09:33:19: didn't pass leak check Message-ID: noted From mdickey at snf.stanford.edu Fri Feb 17 11:51:07 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 17 Feb 2006 11:51:07 -0800 Subject: Problem tylanpoly SNF 2006-02-16 08:44:11: tup not in Message-ID: noted From lindaw at snf.stanford.edu Sun Feb 19 13:13:13 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 19 Feb 2006 13:13:13 -0800 Subject: Problem tylanpoly SNF 2006-02-19 13:13:13: did not pass leak check AMOR585 Message-ID: Pressure during step 35 was 192.9. Program aborted to step 120 after failing leak check. From lindaw at snf.stanford.edu Sun Feb 19 13:35:07 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 19 Feb 2006 13:35:07 -0800 Subject: Problem tylanpoly SNF 2006-02-19 13:35:07: tried AMOR585 again, still not pumping down Message-ID: pressure at step 35 is 202.6. Failed leak check. I noticed this time that when the boat goes into the tube at the start of the run, the manual boat control button lights by itself. I don't recall that this is normal. From lindaw at snf.stanford.edu Sun Feb 19 13:59:39 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 19 Feb 2006 13:59:39 -0800 Subject: Comment tylanpoly SNF 2006-02-19 13:59:38: More observations POLYPUMP Press. High Message-ID: The pressure at step 25 of POLYPUMP is 271.0. When my failed AMOR585 run was done, and the boat returned to the tube, the boat control manual button lit up by itself. When I loaded the polypump program the button un-lit. When I ran the polypump program the manual boat control button stayed un-lit. The pressure is still too high though. From mdickey at snf.stanford.edu Tue Feb 21 14:36:15 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 21 Feb 2006 14:36:15 -0800 Subject: Comment tylanpoly SNF 2006-02-19 13:59:38: More observations POLYPUMP Press. High Message-ID: Replaced leaky flex line. System is ready to use when it comes up to temp From mdickey at snf.stanford.edu Tue Feb 21 14:36:25 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 21 Feb 2006 14:36:25 -0800 Subject: Problem tylanpoly SNF 2006-02-19 13:35:07: tried AMOR585 again, still not pumping down Message-ID: noted From mdickey at snf.stanford.edu Tue Feb 21 14:36:35 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 21 Feb 2006 14:36:35 -0800 Subject: Problem tylanpoly SNF 2006-02-19 13:13:13: did not pass leak check AMOR585 Message-ID: noted From maurice at snf.stanford.edu Tue Feb 21 17:56:55 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 21 Feb 2006 17:56:55 -0800 Subject: Shutdown tylanpoly SNF 2006-02-21 17:56:54: coating...needs test Message-ID: mike pulled tube...found leak From maurice at snf.stanford.edu Wed Feb 22 11:31:22 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Feb 2006 11:31:22 -0800 Subject: Problem tylanpoly SNF 2006-02-22 11:31:21: testing Message-ID: From maurice at snf.stanford.edu Wed Feb 22 11:31:36 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Feb 2006 11:31:36 -0800 Subject: Shutdown tylanpoly SNF 2006-02-21 17:56:54: coating...needs test Message-ID: testing From maurice at snf.stanford.edu Wed Feb 22 14:05:40 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Feb 2006 14:05:40 -0800 Subject: Problem tylanpoly SNF 2006-02-22 11:31:21: testing Message-ID: dep rate good From kimsora at snf.stanford.edu Sat Feb 25 05:20:09 2006 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Sat, 25 Feb 2006 05:20:09 -0800 Subject: Problem tylanpoly SNF 2006-02-25 05:20:09: Uniformity is so bad. Message-ID: I ran AMOR4006. The thickness variances between wafers and over a wafer were 400nm and 200nm, respectively. (The target thickness was 450nm.) Around the boundary of wafers, bad deposition. From lindaw at snf.stanford.edu Sat Feb 25 14:33:02 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 25 Feb 2006 14:33:02 -0800 Subject: Problem tylanpoly SNF 2006-02-25 14:33:02: deposition step prcpr 78.1, should be 400 Message-ID: Ran a test wafer through AMOR585. MFS alarm at deposition step. Step 70 process pressure is 78.1, should be 400. The SIH4 and H2 flows are normal. N2 backfill is 1000, should be 0. Powdery residue on dummy wafers and boats. Last user noticed problem as well. From seymour at snf.stanford.edu Mon Feb 27 09:04:51 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 27 Feb 2006 09:04:51 -0800 Subject: Problem tylanpoly SNF 2006-02-25 14:33:02: deposition step prcpr 78.1, should be 400 Message-ID: replaced faulty pressure sensor. ran poly recipe and at step 60 process pressure was 395.6.