Problem tylanpoly SNF 2006-02-09 09:39:01: furnace tube didn't want to close

jasmine at snf.stanford.edu jasmine at snf.stanford.edu
Thu Feb 9 09:39:01 PST 2006


When I had finished my run and unloaded my wafers I pressed ALM ACK to close the tube. The tube starting moving but stopped midway and I hen had to manually close it..




More information about the tylanpoly-pcs mailing list