Problem tylanpoly SNF 2006-02-25 05:20:09: Uniformity is so bad.

kimsora at snf.stanford.edu kimsora at snf.stanford.edu
Sat Feb 25 05:20:09 PST 2006


I ran AMOR4006. The thickness variances between wafers and over a wafer were 400nm and 200nm, respectively. (The target thickness was 450nm.) Around the boundary of wafers, bad deposition. 




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