Problem tylanpoly SNF 2006-02-25 14:33:02: deposition step prcpr 78.1, should be 400

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat Feb 25 14:33:02 PST 2006


Ran a test wafer through AMOR585.  MFS alarm at deposition step.  Step 70 process pressure is 78.1, should be 400.  The SIH4 and H2 flows are normal.  N2 backfill is 1000, should be 0.  Powdery residue on dummy wafers and boats.  Last user noticed problem as well.  




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