Problem tylanpoly SNF 2006-02-25 14:33:02: deposition step prcpr 78.1, should be 400

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Feb 27 09:04:51 PST 2006


replaced faulty pressure sensor. ran poly recipe and at step 60 process pressure was 395.6.




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