From tberg at snf.stanford.edu Tue Jan 3 12:55:19 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Jan 2006 12:55:19 -0800 Subject: Problem tylanpoly SNF 2005-12-15 13:24:59: Boat stops when it goes into the furnace. Message-ID: noted From tberg at snf.stanford.edu Tue Jan 3 12:58:06 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Jan 2006 12:58:06 -0800 Subject: Comment tylanpoly SNF 2006-01-03 12:58:06: gases purged out Message-ID: Gases purged out to install blanks in VMB From maurice at snf.stanford.edu Tue Jan 3 16:08:53 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Jan 2006 16:08:53 -0800 Subject: Shutdown tylanpoly SNF 2006-01-03 16:08:53: SiH4 flow is zero Message-ID: running polycoat for 00:15:00 9 minutes into deposition step there was an MFS alarm and the SiH4 flow went to zero (setpoint is 136) From maurice at snf.stanford.edu Wed Jan 4 13:40:58 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 4 Jan 2006 13:40:58 -0800 Subject: Comment tylanpoly SNF 2006-01-04 13:40:57: 2nd test thin Message-ID: polyemit for 00:15:00 expected 1500A deposited 993A repeating test From maurice at snf.stanford.edu Wed Jan 4 16:47:48 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 4 Jan 2006 16:47:48 -0800 Subject: Comment tylanpoly SNF 2006-01-04 16:47:47: 3rd test thin Message-ID: polyemit 00:15:00 expected 1500A deposited 963A From tberg at snf.stanford.edu Thu Jan 5 06:29:57 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 5 Jan 2006 06:29:57 -0800 Subject: Comment tylanpoly SNF 2006-01-05 06:29:56: Running dummy run Message-ID: From maurice at snf.stanford.edu Thu Jan 5 16:00:01 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Jan 2006 16:00:01 -0800 Subject: Comment tylanpoly SNF 2006-01-05 16:00:00: 4th test thin Message-ID: expected 1500 deposited 976 From maurice at snf.stanford.edu Thu Jan 5 16:18:44 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Jan 2006 16:18:44 -0800 Subject: Comment tylanpoly SNF 2006-01-05 16:18:43: running 2hr dummy run Message-ID: From maurice at snf.stanford.edu Fri Jan 6 09:53:23 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Jan 2006 09:53:23 -0800 Subject: Comment tylanpoly SNF 2006-01-06 09:53:22: 5th test thin Message-ID: expected 1500 deposited 1004 Ray is pulling the SiH4 MFC From tberg at snf.stanford.edu Fri Jan 6 13:54:14 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Jan 2006 13:54:14 -0800 Subject: Comment tylanpoly SNF 2006-01-06 13:54:13: Flowbase cleaned and calibrated Message-ID: From maurice at snf.stanford.edu Fri Jan 6 15:45:50 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Jan 2006 15:45:50 -0800 Subject: Comment tylanpoly SNF 2006-01-06 15:45:49: 6th test good Message-ID: expected 1500-1800 deposited 1670 From maurice at snf.stanford.edu Fri Jan 6 15:46:34 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Jan 2006 15:46:34 -0800 Subject: Shutdown tylanpoly SNF 2006-01-03 16:08:53: SiH4 flow is zero Message-ID: MFC sensor line cleaned 6th test good From mdickey at snf.stanford.edu Wed Jan 25 05:52:55 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 25 Jan 2006 05:52:55 -0800 Subject: Shutdown tylanpoly SNF 2006-01-25 05:52:54: tube pull Message-ID: down for pull and clean From mdickey at snf.stanford.edu Wed Jan 25 13:21:12 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 25 Jan 2006 13:21:12 -0800 Subject: Comment tylanpoly SNF 2006-01-25 13:21:11: test Message-ID: System pulled and cleaned. Currently in coat. Will need test afterwards From maurice at snf.stanford.edu Wed Jan 25 17:17:56 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Jan 2006 17:17:56 -0800 Subject: Shutdown tylanpoly SNF 2006-01-25 05:52:54: tube pull Message-ID: pulled, cleaned, coated, tested green light From maurice at snf.stanford.edu Wed Jan 25 17:18:16 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Jan 2006 17:18:16 -0800 Subject: Comment tylanpoly SNF 2006-01-25 13:21:11: test Message-ID: test complete geenlight From maurice at snf.stanford.edu Wed Jan 25 17:18:23 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Jan 2006 17:18:23 -0800 Subject: Comment tylanpoly SNF 2006-01-06 15:45:49: 6th test good Message-ID: logged From maurice at snf.stanford.edu Wed Jan 25 17:18:33 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Jan 2006 17:18:33 -0800 Subject: Comment tylanpoly SNF 2006-01-06 13:54:13: Flowbase cleaned and calibrated Message-ID: logged