Shutdown tylanpoly SNF 2006-01-03 16:08:53: SiH4 flow is zero

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Jan 3 16:08:53 PST 2006


running polycoat for 00:15:00
9 minutes into deposition step there was an MFS alarm and the SiH4 flow went to zero (setpoint is 136)




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