Shutdown tylanpoly SNF 2006-01-03 16:08:53: SiH4 flow is zero
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Jan 6 15:46:34 PST 2006
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Shutdown tylanpoly SNF 2006-01-03 16:08:53: SiH4 flow is zero
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Comment tylanpoly SNF 2006-01-04 13:40:57: 2nd test thin
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MFC sensor line cleaned 6th test good
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Shutdown tylanpoly SNF 2006-01-03 16:08:53: SiH4 flow is zero
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Comment tylanpoly SNF 2006-01-04 13:40:57: 2nd test thin
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