Problem tylanpoly SNF 2006-05-14 17:39:46: SiH4 off

ericp at snf.stanford.edu ericp at snf.stanford.edu
Sun May 14 17:39:47 PDT 2006


It appears that the SiH4 is not on. 
Tube is in deposition with SiH4 setpoint
of 136, but SiH4 actual indicates 0.0.  




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