From rcordova at snf.stanford.edu Fri Aug 3 13:30:29 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 3 Aug 2007 13:30:29 -0700 Subject: Problem tylanpoly SNF 2007-08-03 13:30:26: process pressure too high Message-ID: Three times tried to run. Ted Berg found that the process pressure during step 45 was too high. Aborted and removing my wafers. From maurice at snf.stanford.edu Fri Aug 3 14:56:02 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 3 Aug 2007 14:56:02 -0700 Subject: Problem tylanpoly SNF 2007-08-03 13:30:26: process pressure too high Message-ID: Mike adjusted N2 backfill pot. From lindaw at snf.stanford.edu Mon Aug 6 12:33:29 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 6 Aug 2007 12:33:29 -0700 Subject: Problem tylanpoly SNF 2007-08-06 12:33:28: aborts at step 60 overpressure error Message-ID: From lindaw at snf.stanford.edu Mon Aug 6 12:54:32 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 6 Aug 2007 12:54:32 -0700 Subject: Shutdown tylanpoly SNF 2007-08-06 12:54:31: n2 backfill error causing abort at step60 Message-ID: Mike Dickey asked me to shut it down. The N2 backfill is coming on intermittently causing pressure spikes at step 60 of AMOR585. The run aborts to step 80, and finishes pumping and purging the tube before vent. From mtang at snf.stanford.edu Wed Aug 15 15:57:22 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 15 Aug 2007 15:57:22 -0700 Subject: Comment tylanpoly SNF 2007-08-15 15:57:22: Update Message-ID: Ted has the details, but I believe this is what we have so far. It appears that control N2 ballast flow (which is used to control the pressure by loading the pump) is flaky, leading to process pressure control problems. Ted has been working with the vendor to try to troubleshoot the problem to the extent of swapping out various boards. No clear prognosis as yet, sorry. From mtang at snf.stanford.edu Mon Aug 20 09:16:53 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 20 Aug 2007 09:16:53 -0700 Subject: Comment tylanpoly SNF 2007-08-20 09:16:52: Update Message-ID: Moved manometer up to the front of the tube, consistent with other LPCVD systems. Still experience pressure control problem. From rissman at snf.stanford.edu Tue Aug 21 09:21:36 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 21 Aug 2007 09:21:36 -0700 Subject: Comment tylanpoly SNF 2007-08-21 09:21:35: update Message-ID: Checking gas flows. Requested control board from Tylan. From seymour at snf.stanford.edu Thu Aug 23 14:27:03 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Aug 2007 14:27:03 -0700 Subject: Problem tylanpoly SNF 2007-08-06 12:33:28: aborts at step 60 overpressure error Message-ID: NOT ANY MORE From seymour at snf.stanford.edu Thu Aug 23 14:36:58 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Aug 2007 14:36:58 -0700 Subject: Shutdown tylanpoly SNF 2007-08-06 12:54:31: n2 backfill error causing abort at step60 Message-ID: increased the distance between the pressure control sensor and the control n2 source. Replaced all the mono block MFC opamps and checked gas flow against a known source. Ran recipe POLYEMIT and monitored P pressureduring steps 55 through 65. The pressure was a constant 397 +/- 3 mT. All gasses flowed to setpoint or within limits acceptable to the controller. System needs process evaluation for release to users. From seymour at snf.stanford.edu Thu Aug 23 14:44:08 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Aug 2007 14:44:08 -0700 Subject: Problem tylanpoly SNF 2007-08-23 14:44:07: needs testing after repair. Message-ID: I ran Polyemit and had great pressure control. all gas flows were stable. Now needs a film quality test. From maurice at snf.stanford.edu Thu Aug 23 16:50:05 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Aug 2007 16:50:05 -0700 Subject: Shutdown tylanpoly SNF 2007-08-23 16:50:04: Running test after maint work Message-ID: Running Poly test. Wafers in system From maurice at snf.stanford.edu Fri Aug 24 11:31:59 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 24 Aug 2007 11:31:59 -0700 Subject: Shutdown tylanpoly SNF 2007-08-23 16:50:04: Running test after maint work Message-ID: Uniformity good. Dep rate higher. Expected 2100 Ang Actual 2617 From maurice at snf.stanford.edu Fri Aug 24 11:34:24 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 24 Aug 2007 11:34:24 -0700 Subject: Problem tylanpoly SNF 2007-08-23 14:44:07: needs testing after repair. Message-ID: Uniformity good. Dep rate higher. Expected 2100 Ang Actual 2617 From maurice at snf.stanford.edu Fri Aug 24 11:45:02 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 24 Aug 2007 11:45:02 -0700 Subject: Problem tylanpoly SNF 2007-08-24 11:45:01: Dep rate higher Message-ID: Last POLYEMIT test showed good uniformity but Dep rate higher. Expected 2100 Ang Actual 2617 You may want to run a test tun before committing your process wafers. From rcordova at snf.stanford.edu Fri Aug 24 15:58:33 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 24 Aug 2007 15:58:33 -0700 Subject: Comment tylanpoly SNF 2007-08-24 15:58:32: When tube pulls out I got a MFS alarm Message-ID: Cleared it, and continued to load and run process: "Amor525" when process completed, and when tube was boating out, again, MFS alarm. From rcordova at snf.stanford.edu Fri Aug 24 16:15:42 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 24 Aug 2007 16:15:42 -0700 Subject: Comment tylanpoly SNF 2007-08-24 16:15:41: Dep rate high: Poly thickness: AMOR525 at 1:05:00 Message-ID: usual thickness is 700a at 1:20:00, reduced to 1:05:00 and thickness is 845-865a From mtang at snf.stanford.edu Tue Aug 28 09:21:43 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 28 Aug 2007 09:21:43 -0700 Subject: Problem tylanpoly SNF 2007-08-28 09:21:43: Process may have shifted Message-ID: RI and stress are the same. More characterization underway. Please report uniformity values (especially across a load/boat) to Staff and on Coral. From rcordova at snf.stanford.edu Tue Aug 28 13:54:42 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 28 Aug 2007 13:54:42 -0700 Subject: Comment tylanpoly SNF 2007-08-28 13:54:42: Message to Maurice: Message-ID: I was unable to get a reading on the dummy wafer, so there is no entry for that. Can you tell me if the same program for reading thickness, or different. Maybe because I have 11,000a of oxide under my poly, could not use the same set up? From tberg at snf.stanford.edu Fri Aug 31 10:23:31 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 31 Aug 2007 10:23:31 -0700 Subject: Comment tylanpoly SNF 2007-08-28 13:54:42: Message to Maurice: Message-ID: Noted From tberg at snf.stanford.edu Fri Aug 31 10:24:00 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 31 Aug 2007 10:24:00 -0700 Subject: Comment tylanpoly SNF 2007-08-15 15:57:22: Update Message-ID: noted From tberg at snf.stanford.edu Fri Aug 31 10:24:13 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 31 Aug 2007 10:24:13 -0700 Subject: Comment tylanpoly SNF 2007-08-20 09:16:52: Update Message-ID: Noted From tberg at snf.stanford.edu Fri Aug 31 10:25:16 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 31 Aug 2007 10:25:16 -0700 Subject: Comment tylanpoly SNF 2007-08-21 09:21:35: update Message-ID: Working OK From tberg at snf.stanford.edu Fri Aug 31 10:25:37 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 31 Aug 2007 10:25:37 -0700 Subject: Comment tylanpoly SNF 2007-08-24 15:58:32: When tube pulls out I got a MFS alarm Message-ID: Can not duplicate From tberg at snf.stanford.edu Fri Aug 31 10:26:17 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 31 Aug 2007 10:26:17 -0700 Subject: Problem tylanpoly SNF 2007-08-24 11:45:01: Dep rate higher Message-ID: Noted