Problem tylanpoly SNF 2007-08-03 13:30:26: process pressure too high

rcordova at snf.stanford.edu rcordova at snf.stanford.edu
Fri Aug 3 13:30:29 PDT 2007


Three times tried to run.  Ted Berg found that the process pressure during step 45 was too high.  Aborted and removing my wafers.




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