Shutdown tylanpoly SNF 2007-08-06 12:54:31: n2 backfill error causing abort at step60

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu Aug 23 14:36:58 PDT 2007


increased the distance between the pressure control sensor and the control n2 source. Replaced all the mono block MFC opamps and checked gas flow against a known source.
Ran recipe POLYEMIT and monitored P pressureduring steps 55 through 65. The pressure was a constant 397 +/- 3 mT.
All gasses flowed to setpoint or within limits acceptable to the controller. System needs process evaluation for release to users.




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