Problem tylanpoly SNF 2007-08-24 11:45:01: Dep rate higher

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Aug 24 11:45:02 PDT 2007


 Last POLYEMIT test showed good uniformity but Dep rate higher.
Expected 2100 Ang
Actual  2617
You may want to run a test tun before committing your process wafers.




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