From mdickey at snf.stanford.edu Tue May 1 06:58:49 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 May 2007 06:58:49 -0700 Subject: Comment tylanpoly SNF 2007-05-01 06:58:48: O ring Message-ID: The tube port O ring needs to be replaced. Cooling down the furnace to work on it. From mdickey at snf.stanford.edu Tue May 1 07:39:33 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 May 2007 07:39:33 -0700 Subject: Comment tylanpoly SNF 2007-05-01 06:58:48: O ring Message-ID: replaced O ring From mdickey at snf.stanford.edu Tue May 1 07:39:55 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 May 2007 07:39:55 -0700 Subject: Shutdown tylanpoly SNF 2007-04-30 15:04:34: tube will no pump down Message-ID: Replaced tube port O ring. When tube comes up to temp it is ready for use From seymour at snf.stanford.edu Tue May 1 08:35:25 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 May 2007 08:35:25 -0700 Subject: Problem tylanpoly SNF 2007-05-01 08:35:25: needs test after repair Message-ID: From maurice at snf.stanford.edu Tue May 1 10:59:45 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 1 May 2007 10:59:45 -0700 Subject: Shutdown tylanpoly SNF 2007-05-01 10:59:45: testing Message-ID: From maurice at snf.stanford.edu Tue May 1 16:06:27 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 1 May 2007 16:06:27 -0700 Subject: Comment tylanpoly SNF 2007-05-01 16:06:26: running second test Message-ID: SiH4 flow too high on first test From maurice at stanford.edu Tue May 1 17:03:16 2007 From: maurice at stanford.edu (maurice stevens) Date: Tue, 01 May 2007 17:03:16 -0700 Subject: Comment tylanpoly SNF 2007-05-01 16:06:26: running second test In-Reply-To: <20070501230627.2F25B4C66D@smtp1.stanford.edu> References: <20070501230627.2F25B4C66D@smtp1.stanford.edu> Message-ID: <4637D544.4040500@stanford.edu> Test in tube. Will unload it in the morning. maurice at snf.stanford.edu wrote: > SiH4 flow too high on first test > > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at snf.stanford.edu Wed May 2 11:25:48 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 11:25:48 -0700 Subject: Comment tylanpoly SNF 2007-05-02 11:25:47: dep good Message-ID: mislam read test wafer. Expected ~2400 Ang Actual ~2150 From maurice at snf.stanford.edu Wed May 2 11:26:35 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 11:26:35 -0700 Subject: Shutdown tylanpoly SNF 2007-05-01 10:59:45: testing Message-ID: mislam read test wafer. Expected ~2400 Ang Actual ~2150 From maurice at snf.stanford.edu Wed May 2 11:26:51 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 11:26:51 -0700 Subject: Problem tylanpoly SNF 2007-05-01 08:35:25: needs test after repair Message-ID: mislam read test wafer. Expected ~2400 Ang Actual ~2150 From maurice at snf.stanford.edu Wed May 2 11:27:03 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 11:27:03 -0700 Subject: Problem tylanpoly SNF 2007-04-29 22:17:55: re tried it, same problems, no dep. Message-ID: mislam read test wafer. Expected ~2400 Ang Actual ~2150 From maurice at snf.stanford.edu Wed May 2 11:27:14 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 11:27:14 -0700 Subject: Comment tylanpoly SNF 2007-05-01 16:06:26: running second test Message-ID: mislam read test wafer. Expected ~2400 Ang Actual ~2150 From maurice at snf.stanford.edu Mon May 7 11:55:45 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 May 2007 11:55:45 -0700 Subject: Problem tylanpoly SNF 2007-05-07 11:55:44: amor585 lower dep rate Message-ID: Axiu reports amor585 dep rat 75% of normal From maurice at snf.stanford.edu Tue May 8 17:37:29 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 May 2007 17:37:29 -0700 Subject: Problem tylanpoly SNF 2007-05-08 17:37:29: Amor585 temps not at setpoint during dep Message-ID: Axiu reports: Cross boat unformity is 30% for 8 slots. I ran amor585 program and found at beginning of dep L setpoint 582 actual 578 C setpoint 585 actual 587 S setpoint 587 actual 601 After 13min of deposition L 582 C 584 S 596 From mislam at snf.stanford.edu Thu May 10 07:45:29 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 10 May 2007 07:45:29 -0700 Subject: Problem tylanpoly SNF 2007-05-10 07:45:28: host computer frozen Message-ID: can not load pump program From tberg at snf.stanford.edu Thu May 10 08:06:07 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 May 2007 08:06:07 -0700 Subject: Comment tylanpoly SNF 2007-05-10 08:06:07: TEmp cal Message-ID: From tberg at snf.stanford.edu Fri May 11 06:17:05 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 May 2007 06:17:05 -0700 Subject: Problem tylanpoly SNF 2007-05-10 07:45:28: host computer frozen Message-ID: reset From maurice at snf.stanford.edu Mon May 14 14:14:04 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 May 2007 14:14:04 -0700 Subject: Shutdown tylanpoly SNF 2007-05-14 14:14:04: failing pumpprogram Message-ID: From seymour at snf.stanford.edu Mon May 14 14:47:14 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 14 May 2007 14:47:14 -0700 Subject: Shutdown tylanpoly SNF 2007-05-14 14:14:04: failing pumpprogram Message-ID: removed and cleaned silane mfc. adjusted mfc zero and checked operation. needs testing for dep rate. From maurice at snf.stanford.edu Mon May 14 16:09:37 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 May 2007 16:09:37 -0700 Subject: Comment tylanpoly SNF 2007-05-14 16:09:36: testing uniformity/dep rate Message-ID: From maurice at snf.stanford.edu Mon May 14 17:48:24 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 May 2007 17:48:24 -0700 Subject: Shutdown tylanpoly SNF 2007-05-14 17:48:23: Possible burnbox Issue Message-ID: From maurice at snf.stanford.edu Mon May 14 18:14:13 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 May 2007 18:14:13 -0700 Subject: Comment tylanpoly SNF 2007-05-14 18:14:13: amor585 test Message-ID: AMOR585 00:20:00 Each test wafer had one dummy wafer in front of it and one behind it. Temps looked good at beginning of deposition. #3 971 ang #12 1216 ang #24 833 ang From seymour at snf.stanford.edu Fri May 18 13:44:50 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 18 May 2007 13:44:50 -0700 Subject: Shutdown tylanpoly SNF 2007-05-14 17:48:23: Possible burnbox Issue Message-ID: system does no9t have a problem with burnbox From maurice at snf.stanford.edu Fri May 18 16:45:57 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 May 2007 16:45:57 -0700 Subject: Comment tylanpoly SNF 2007-05-18 16:45:56: Test /Bad wafer to wafer Message-ID: Test During training Polyemit 00:30:00 expected 3000A #2 dummy #3 dummy #4 3017 #5 3156 #6 3245 #7 3478 #8 dummy From shott at snf.stanford.edu Sat May 19 08:24:01 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 19 May 2007 08:24:01 -0700 Subject: Shutdown tylanpoly SNF 2007-05-19 08:24:00: Needs restart after power failure ... Message-ID: From shott at snf.stanford.edu Sun May 20 09:59:11 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 20 May 2007 09:59:11 -0700 Subject: Shutdown tylanpoly SNF 2007-05-19 08:24:00: Needs restart after power failure ... Message-ID: Eric P. restarted this tube ... John From mtang at snf.stanford.edu Mon May 21 09:12:29 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 21 May 2007 09:12:29 -0700 Subject: Shutdown tylanpoly SNF 2007-05-21 09:12:29: Uniformity still under investigation... Message-ID: From seymour at snf.stanford.edu Tue May 22 10:34:17 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 May 2007 10:34:17 -0700 Subject: Comment tylanpoly SNF 2007-05-10 08:06:07: TEmp cal Message-ID: temp cal completed on tylanpoly tcu. From seymour at snf.stanford.edu Tue May 22 10:34:55 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 May 2007 10:34:55 -0700 Subject: Problem tylanpoly SNF 2007-05-08 17:37:29: Amor585 temps not at setpoint during dep Message-ID: temp completed From seymour at snf.stanford.edu Wed May 23 14:36:21 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 May 2007 14:36:21 -0700 Subject: Comment tylanpoly SNF 2007-05-23 14:36:21: Silane flow Message-ID: I inserted a N2 MFc in series with the Monoblock Silane MFC and flowed N2 through the system. The Flowmeter indicated 180 SCCM of N2 when the calculated value was 166 SCCM. The system silane line was check for leaks and silane turned back on and flowed to setpoint of 100 SCCM From maurice at snf.stanford.edu Thu May 24 11:07:57 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 May 2007 11:07:57 -0700 Subject: Comment tylanpoly SNF 2007-05-24 11:07:57: running test with boats in flatzone Message-ID: From maurice at snf.stanford.edu Thu May 24 14:06:02 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 May 2007 14:06:02 -0700 Subject: Comment tylanpoly SNF 2007-05-24 11:07:57: running test with boats in flatzone Message-ID: Test after Ray moved boats to flat zone as per Ted's suggestion. Uniformity is better than last test. It is not great but we have seen it like this in the past. polyemit 00:30:00 expected 3400Ang tcblr #3 3535 3541 3579 3542 3567 #4 3599 3620 3612 3612 3618 #5 3676 3690 3681 3690 3675 From maurice at snf.stanford.edu Thu May 24 14:16:07 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 May 2007 14:16:07 -0700 Subject: Shutdown tylanpoly SNF 2007-05-21 09:12:29: Uniformity still under investigation... Message-ID: Test after Ray moved boats to flat zone as per Ted's suggestion. Uniformity is better than last test. It is not great but we have seen it like this in the past. System will be yellow lighted. From maurice at snf.stanford.edu Thu May 24 14:16:56 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 May 2007 14:16:56 -0700 Subject: Problem tylanpoly SNF 2007-05-07 11:55:44: amor585 lower dep rate Message-ID: Ann will run another test From maurice at snf.stanford.edu Thu May 24 14:22:28 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 May 2007 14:22:28 -0700 Subject: Problem tylanpoly SNF 2007-05-24 14:22:27: Uniformity issue Message-ID: Uniformity is better than last test. It is not great but we have seen it like this in the past. Two users has asked that the system be yellow lighted. The uniformity is exceptable for them. polyemit 00:30:00 expected 3400Ang top cent bot lef rig front boat #3 3535 3541 3579 3542 3567 #4 3599 3620 3612 3612 3618 #5 3676 3690 3681 3690 3675 From maurice at snf.stanford.edu Thu May 24 17:33:37 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 May 2007 17:33:37 -0700 Subject: Shutdown tylanpoly SNF 2007-05-24 17:33:36: Failed leakcheck 3x Message-ID: Ann was running a amor585 test. Failed leakcheck twice We switch to polyemit recipe. It also failed leakcheck From axiu at snf.stanford.edu Thu May 24 18:43:14 2007 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Thu, 24 May 2007 18:43:14 -0700 Subject: Shutdown tylanpoly SNF 2007-05-24 18:43:11: Failed pump Message-ID: From mdickey at snf.stanford.edu Fri May 25 07:07:37 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 25 May 2007 07:07:37 -0700 Subject: Shutdown tylanpoly SNF 2007-05-24 18:43:11: Failed pump Message-ID: Tightened tube port O ring, back in pump program From mdickey at snf.stanford.edu Fri May 25 07:07:51 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 25 May 2007 07:07:51 -0700 Subject: Shutdown tylanpoly SNF 2007-05-24 17:33:36: Failed leakcheck 3x Message-ID: Tightened tube port o ring From maurice at snf.stanford.edu Fri May 25 14:25:29 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 May 2007 14:25:29 -0700 Subject: Problem tylanpoly SNF 2007-05-25 14:25:28: Re: oxygen levels in poly tube Message-ID: Arvind Kamath of Kovio reports: " We recently ran SIMS on undoped poly (tylanpoly) and found 3% oxygen levels (This is ~ 10X compared to earlier results)." At this time we don't when the deposition was made. We will run wafers on both poly tubes (they share a common gas line) and send them out to check the O2 level. Once we have more information we with share it with you. From maurice at snf.stanford.edu Fri May 25 15:05:28 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 May 2007 15:05:28 -0700 Subject: Comment tylanpoly SNF 2007-05-25 15:05:27: Test Message-ID: Ann running test after "o" ring replaced From skoh at snf.stanford.edu Sat May 26 00:30:26 2007 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sat, 26 May 2007 00:30:26 -0700 Subject: Problem tylanpoly SNF 2007-05-26 00:30:25: MFS Alarm, tube won't vent after process done Message-ID: Had MFS alarm for N2 during the process. (MFS Error 08) Tube did not vent and did not boat out when process was finished. From skoh at snf.stanford.edu Sat May 26 00:34:40 2007 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sat, 26 May 2007 00:34:40 -0700 Subject: Comment tylanpoly SNF 2007-05-26 00:34:39: amor525 test Message-ID: amor525 02:45:00 front boat, starting from front (load end) center left top right bottom #2 972 959 989 988 959 #5 1125 1091 1129 1139 1118 #8 1286 1240 1268 1282 1266 From lindaw at snf.stanford.edu Sat May 26 13:08:30 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 26 May 2007 13:08:30 -0700 Subject: Problem tylanpoly SNF 2007-05-26 13:08:30: tube not venting in polypump ready mode Message-ID: I pressed alarm ack 2X to vent the tube, but the tube is not venting. The N2PURG output calls for 1499.3 flow rate. The measured N2PURG is reading 5000 and the PRCPR is only reading 174.8. MFS alarm went off while wating for tube to vent. Also, the N2light on the front panel is blinking, but the below atm light remains lit. After waiting about 10 min, the PRCPR is has only gon up to 344.8. I am going to run polypump and try venting again. From lindaw at snf.stanford.edu Sat May 26 13:27:17 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 26 May 2007 13:27:17 -0700 Subject: Problem tylanpoly SNF 2007-05-26 13:27:16: still won't vent Message-ID: with polypump running, N2PURG output calls for 100.1, but the N2PURG is reading 5000, and PRCPR is reading 5.3. I give up. MFS alarm 08 just went off while typing this. From skoh at snf.stanford.edu Sun May 27 16:22:32 2007 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sun, 27 May 2007 16:22:32 -0700 Subject: Comment tylanpoly SNF 2007-05-27 16:22:31: Additional comment to amor525 test 5/26 Message-ID: Amor525 02:45:00, expected ~1500A to 1600A, but thickness obtained was only 960A to 1290A. From lindaw at snf.stanford.edu Tue May 29 07:31:12 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 29 May 2007 07:31:12 -0700 Subject: Problem tylanpoly SNF 2007-05-29 07:31:11: MFS alarm Message-ID: Found the tube in ready mode of polypump this morning with the MFS alarm sonic on. N2PURG reading 4418. MFS error 01. From mdickey at snf.stanford.edu Tue May 29 09:31:18 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 29 May 2007 09:31:18 -0700 Subject: Shutdown tylanpoly SNF 2007-05-29 09:31:18: Not venting Message-ID: Looking into venting problem From maurice at snf.stanford.edu Tue May 29 17:06:52 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 29 May 2007 17:06:52 -0700 Subject: Comment tylanpoly SNF 2007-05-29 17:06:51: running polyemit test Message-ID: Ray adjusted H2 flow. Running Polyemit test Will unload test Wed morning From maurice at snf.stanford.edu Wed May 30 10:45:31 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 10:45:31 -0700 Subject: Problem tylanpoly SNF 2007-05-24 14:22:27: Uniformity issue Message-ID: 5/29/07 Test after Ray adjusted H2 flow Polyemit 00:30:00 (c,t,b,l,r) 3407 3422 3422 3439 3424 3407 3441 3419 3420 3436 3414 3489 3401 3431 3446 looks very good wafer to wafer From maurice at snf.stanford.edu Wed May 30 10:45:40 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 10:45:40 -0700 Subject: Comment tylanpoly SNF 2007-05-29 17:06:51: running polyemit test Message-ID: 5/29/07 Test after Ray adjusted H2 flow Polyemit 00:30:00 (c,t,b,l,r) 3407 3422 3422 3439 3424 3407 3441 3419 3420 3436 3414 3489 3401 3431 3446 looks very good wafer to wafer From maurice at snf.stanford.edu Wed May 30 10:53:59 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 10:53:59 -0700 Subject: Shutdown tylanpoly SNF 2007-05-29 09:31:18: Not venting Message-ID: Mike fixed it From maurice at snf.stanford.edu Wed May 30 10:54:19 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 10:54:19 -0700 Subject: Problem tylanpoly SNF 2007-05-26 13:27:16: still won't vent Message-ID: Mike fixed it From maurice at snf.stanford.edu Wed May 30 10:54:33 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 10:54:33 -0700 Subject: Problem tylanpoly SNF 2007-05-29 07:31:11: MFS alarm Message-ID: Mike fixed it From maurice at snf.stanford.edu Wed May 30 10:54:49 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 10:54:49 -0700 Subject: Comment tylanpoly SNF 2007-05-27 16:22:31: Additional comment to amor525 test 5/26 Message-ID: logged From maurice at snf.stanford.edu Wed May 30 11:20:57 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 11:20:57 -0700 Subject: Comment tylanpoly SNF 2007-05-02 11:25:47: dep good Message-ID: from 5/2/07 logged From maurice at snf.stanford.edu Wed May 30 11:21:19 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 11:21:19 -0700 Subject: Comment tylanpoly SNF 2007-05-14 16:09:36: testing uniformity/dep rate Message-ID: fromm 5/14/07 logged From maurice at snf.stanford.edu Wed May 30 11:22:01 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 11:22:01 -0700 Subject: Comment tylanpoly SNF 2007-05-14 18:14:13: amor585 test Message-ID: from 5/14/07 logged From maurice at snf.stanford.edu Wed May 30 11:22:36 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 11:22:36 -0700 Subject: Comment tylanpoly SNF 2007-05-25 15:05:27: Test Message-ID: from 5/25/07 logged From maurice at snf.stanford.edu Wed May 30 11:23:10 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 11:23:10 -0700 Subject: Comment tylanpoly SNF 2007-05-23 14:36:21: Silane flow Message-ID: from 5/23/07 logged From maurice at snf.stanford.edu Wed May 30 11:23:48 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 11:23:48 -0700 Subject: Comment tylanpoly SNF 2007-05-18 16:45:56: Test /Bad wafer to wafer Message-ID: from 5/18/07 logged From maurice at snf.stanford.edu Wed May 30 11:24:39 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 11:24:39 -0700 Subject: Problem tylanpoly SNF 2007-05-26 13:08:30: tube not venting in polypump ready mode Message-ID: logged From maurice at snf.stanford.edu Wed May 30 11:24:59 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 11:24:59 -0700 Subject: Comment tylanpoly SNF 2007-05-26 00:34:39: amor525 test Message-ID: logged From maurice at snf.stanford.edu Wed May 30 11:25:27 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 11:25:27 -0700 Subject: Problem tylanpoly SNF 2007-05-26 00:30:25: MFS Alarm, tube won't vent after process done Message-ID: logged From pnataraj at snf.stanford.edu Wed May 30 16:58:53 2007 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Wed, 30 May 2007 16:58:53 -0700 Subject: Problem tylanpoly SNF 2007-05-30 16:58:53: failed leak check Message-ID: From lindaw at snf.stanford.edu Wed May 30 17:33:10 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 30 May 2007 17:33:10 -0700 Subject: Problem tylanpoly SNF 2007-05-30 17:33:10: ran amor525 with dummy wafers only Message-ID: failed leak check at step 35. Base pressure only got down to 332.5. I will try running amor585 with only dummies to se if the base pressure degrades any further. Maurice observed the base pressure of pnataraj's failed leak check to be ~110 with his wafers. So the base pressure has gone from ~110 to 330 from one run to the next. From lindaw at snf.stanford.edu Wed May 30 18:41:39 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 30 May 2007 18:41:39 -0700 Subject: Comment tylanpoly SNF 2007-05-30 18:41:39: AMOR585 test dummy wafers only Message-ID: Ran a test of amor585 dummy wafers only. step 35 base pressure reached 78.1-81.0, better than expected so leak may be self healing. I put the tube in hold at step 40 and let it sit ~20 min. It finally reached normal base presure of 5.3-10.7. Put tube back into run and step 45 leak back came up to 55.6. It passed leak check and moved onto step 50. I aborted the run and let the tube vent. I ran the same program again, with dummy wafers only, no hold at step 40 and this time step 35 pumped right down to 5.3-7.8, but the leak back came up to 66.9, and failed leak check. Conclusion is there is still a significant leak. From lindaw at snf.stanford.edu Wed May 30 18:46:17 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 30 May 2007 18:46:17 -0700 Subject: Problem tylanpoly SNF 2007-05-30 18:46:17: boat failed to come completely out after leak Message-ID: check failure. It only came out about 1/4 of the way. ended program and boat went back in ok. Ran polypump. From mdickey at snf.stanford.edu Thu May 31 06:36:30 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 31 May 2007 06:36:30 -0700 Subject: Problem tylanpoly SNF 2007-05-30 18:46:17: boat failed to come completely out after leak Message-ID: noted From mdickey at snf.stanford.edu Thu May 31 06:36:52 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 31 May 2007 06:36:52 -0700 Subject: Comment tylanpoly SNF 2007-05-30 18:41:39: AMOR585 test dummy wafers only Message-ID: Fixed leak From mdickey at snf.stanford.edu Thu May 31 06:37:02 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 31 May 2007 06:37:02 -0700 Subject: Problem tylanpoly SNF 2007-05-30 17:33:10: ran amor525 with dummy wafers only Message-ID: Leak fixed From mdickey at snf.stanford.edu Thu May 31 06:37:45 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 31 May 2007 06:37:45 -0700 Subject: Problem tylanpoly SNF 2007-05-30 16:58:53: failed leak check Message-ID: Leak fixed. An order will be made for a different O ring material for the tube port. From pnataraj at snf.stanford.edu Thu May 31 21:32:48 2007 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Thu, 31 May 2007 21:32:48 -0700 Subject: Comment tylanpoly SNF 2007-05-31 21:32:48: Have to hold on pumpdown step Message-ID: Failed leak check first, but holding for some time during pumpdown brought the Pr to about 1.6. I will SEM my samples tomorrow and report the thickness.