Problem tylanpoly SNF 2007-05-08 17:37:29: Amor585 temps not at setpoint during dep

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue May 8 17:37:29 PDT 2007


Axiu reports: Cross boat unformity is 30% for 8 slots. 
I ran amor585 program and found at beginning of dep
L setpoint 582  actual  578
C setpoint 585  actual  587
S setpoint 587  actual  601
After 13min of deposition
L  582
C  584
S  596




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