Comment tylanpoly SNF 2007-05-23 14:36:21: Silane flow

seymour at snf.stanford.edu seymour at snf.stanford.edu
Wed May 23 14:36:21 PDT 2007


I inserted a N2 MFc in series with the Monoblock Silane MFC and flowed N2 through the system. The Flowmeter indicated 180 SCCM of N2 when the calculated value was 166 SCCM.
The system silane line was check for leaks and silane turned back on and flowed to setpoint of 100 SCCM




More information about the tylanpoly-pcs mailing list