Problem tylanpoly SNF 2007-05-30 17:33:10: ran amor525 with dummy wafers only

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Wed May 30 17:33:10 PDT 2007


failed leak check at step 35. Base pressure only got down to 332.5.  I will try running amor585 with only dummies to se if the base pressure degrades any further.  Maurice observed the base pressure of pnataraj's failed leak check to be ~110 with his wafers.  So the base pressure has gone from ~110 to 330 from one run to the next.




More information about the tylanpoly-pcs mailing list