From lindaw at snf.stanford.edu Wed Apr 2 15:09:41 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 2 Apr 2008 15:09:41 -0700 Subject: Problem tylanpoly SNF 2008-04-02 15:09:41: ran amor585 no poly deposition Message-ID: Wafers ran through the entire process, but no poly deposition!!!!!!!!!! From lindaw at snf.stanford.edu Wed Apr 2 15:11:30 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 2 Apr 2008 15:11:30 -0700 Subject: Problem tylanpoly SNF 2008-04-02 15:11:29: Also, screen showed a TCU error 80 Message-ID: when displaying tube status on the tycom. From lindaw at snf.stanford.edu Wed Apr 2 15:16:27 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 2 Apr 2008 15:16:27 -0700 Subject: Problem tylanpoly SNF 2008-04-02 15:16:26: when I press run to start polypump Message-ID: display at panel reads TCU IO ERR From lindaw at snf.stanford.edu Wed Apr 2 15:17:39 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 2 Apr 2008 15:17:39 -0700 Subject: Problem tylanpoly SNF 2008-04-02 15:17:39: question marks next to temps on tycom display Message-ID: The status display on the tycom shows question marks to the right of the temperatures. WTF??? From seymour at snf.stanford.edu Wed Apr 2 15:42:57 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 2 Apr 2008 15:42:57 -0700 Subject: Problem tylanpoly SNF 2008-04-02 15:09:41: ran amor585 no poly deposition Message-ID: Tube not up to temp due to TCU error 80, TCU power off. I power up and reset error. From seymour at snf.stanford.edu Wed Apr 2 15:43:11 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 2 Apr 2008 15:43:11 -0700 Subject: Problem tylanpoly SNF 2008-04-02 15:11:29: Also, screen showed a TCU error 80 Message-ID: cleared error From seymour at snf.stanford.edu Wed Apr 2 15:43:49 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 2 Apr 2008 15:43:49 -0700 Subject: Problem tylanpoly SNF 2008-04-02 15:16:26: when I press run to start polypump Message-ID: tube heating up to normal idle temp From seymour at snf.stanford.edu Wed Apr 2 15:46:27 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 2 Apr 2008 15:46:27 -0700 Subject: Problem tylanpoly SNF 2008-04-02 15:17:39: question marks next to temps on tycom display Message-ID: Tycom communication with slave computer was not receiving a temp reading so it shows last good temp and ? marks after temp. The slave computer output to the front panel showed TCU Error. From maurice at snf.stanford.edu Tue Apr 8 15:37:24 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Apr 2008 15:37:24 -0700 Subject: Shutdown tylanpoly SNF 2008-04-08 15:37:23: Door interlock Message-ID: rcordova reports door issue. Recipe not going past step 10. From seymour at snf.stanford.edu Wed Apr 9 09:22:57 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 9 Apr 2008 09:22:57 -0700 Subject: Shutdown tylanpoly SNF 2008-04-08 15:37:23: Door interlock Message-ID: Mike adjusted door flag to give door interlock a on reading on tycom. pumped tube down and did a leak check and it noow is in polypump recipe. From seymour at snf.stanford.edu Thu Apr 10 14:00:01 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 10 Apr 2008 14:00:01 -0700 Subject: Comment tylanpoly SNF 2008-04-10 14:00:01: tube is ready for a test Message-ID: pull and clean completed, leak check good. Tube coated and ready for a test. From seymour at snf.stanford.edu Thu Apr 10 14:04:09 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 10 Apr 2008 14:04:09 -0700 Subject: Comment tylanpoly SNF 2008-04-10 14:04:09: the above was for teos not poly. I did a pm on this Message-ID: N2 purge alarms after cycle end. I opened up the control valve connection and adjusted it it for 10% over the max flow (5000 sccm). I then checked all zeros and did an auto zero routine. I checked N2 Purge and it flows to setpoint of 3500 sccm during push and pull on recipes. From tberg at snf.stanford.edu Thu Apr 10 14:14:19 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Apr 2008 14:14:19 -0700 Subject: Comment tylanpoly SNF 2008-04-10 14:00:01: tube is ready for a test Message-ID: wrong tube From tberg at snf.stanford.edu Thu Apr 10 14:14:36 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Apr 2008 14:14:36 -0700 Subject: Comment tylanpoly SNF 2008-04-10 14:04:09: the above was for teos not poly. I did a pm on this Message-ID: noted