Comment tylanpoly SNF 2008-04-10 14:04:09: the above was for teos not poly. I did a pm on this

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu Apr 10 14:04:09 PDT 2008


N2 purge alarms after cycle end. I opened up the control valve connection and adjusted it it for 10% over the max flow (5000 sccm). I then checked all zeros and did an auto zero routine. I checked N2 Purge and it flows to setpoint of 3500 sccm during push and pull on recipes.




More information about the tylanpoly-pcs mailing list