From maryamzm at snf.stanford.edu Sun Aug 10 23:44:56 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Sun, 10 Aug 2008 23:44:56 -0700 Subject: Comment tylanpoly SNF 2008-08-10 23:44:55: tycom reset Message-ID: tycom was not responding for a while...so I reset it . 8/10/08 11:38pm. From huimei at snf.stanford.edu Thu Aug 14 12:13:30 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Thu, 14 Aug 2008 12:13:30 -0700 Subject: Shutdown tylanpoly SNF 2008-08-14 12:13:30: can not open the door Message-ID: after ack alarn twice and wait around 40minutes, still can not open the door From tberg at snf.stanford.edu Thu Aug 14 13:39:45 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Aug 2008 13:39:45 -0700 Subject: Comment tylanpoly SNF 2008-08-14 13:39:44: 110 vac to bank gone Message-ID: 110vac to bank gone From tberg at snf.stanford.edu Thu Aug 14 13:58:55 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Aug 2008 13:58:55 -0700 Subject: Shutdown tylanpoly SNF 2008-08-14 12:13:30: can not open the door Message-ID: 110vac to bank gone. replaced fuse and vented ok From tberg at snf.stanford.edu Mon Aug 18 06:38:00 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:38:00 -0700 Subject: Comment tylanpoly SNF 2008-08-14 13:39:44: 110 vac to bank gone Message-ID: Replaced fuse checked operation From tberg at snf.stanford.edu Mon Aug 18 06:38:09 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:38:09 -0700 Subject: Comment tylanpoly SNF 2008-08-10 23:44:55: tycom reset Message-ID: noted From huimei at snf.stanford.edu Tue Aug 19 14:54:05 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Tue, 19 Aug 2008 14:54:05 -0700 Subject: Problem tylanpoly SNF 2008-08-19 14:54:04: it show no SiH4 gas Message-ID: my setting of deposition for SiH4 is 136, but in deposition, the SiH4 read 0 From maurice at snf.stanford.edu Tue Aug 19 16:03:57 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Aug 2008 16:03:57 -0700 Subject: Problem tylanpoly SNF 2008-08-19 14:54:04: it show no SiH4 gas Message-ID: Training issue. User had 8 sec of dep time. From king at snf.stanford.edu Wed Aug 20 18:37:16 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 20 Aug 2008 18:37:16 -0700 Subject: Problem tylanpoly SNF 2008-08-20 18:37:15: Tylan poly is alarming for H2 in step 25 Message-ID: From dgunning at snf.stanford.edu Thu Aug 21 05:50:11 2008 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Thu, 21 Aug 2008 05:50:11 -0700 Subject: Problem tylanpoly SNF 2008-08-21 05:50:10: low temperature polyemit Message-ID: deposition running at temperature 567.9 oC so had to abort process. was in ready status when i arrived to use tube - polypump not running. From tberg at snf.stanford.edu Thu Aug 21 07:54:42 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Aug 2008 07:54:42 -0700 Subject: Shutdown tylanpoly SNF 2008-08-21 07:54:41: bad SCR cooling fan Message-ID: From tberg at snf.stanford.edu Thu Aug 21 09:24:54 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Aug 2008 09:24:54 -0700 Subject: Comment tylanpoly SNF 2008-08-21 09:24:52: Getting fan for Replacement Message-ID: From tberg at snf.stanford.edu Thu Aug 21 11:32:23 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Aug 2008 11:32:23 -0700 Subject: Shutdown tylanpoly SNF 2008-08-21 07:54:41: bad SCR cooling fan Message-ID: replaced fan heating up now From tberg at snf.stanford.edu Thu Aug 21 12:27:10 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Aug 2008 12:27:10 -0700 Subject: Problem tylanpoly SNF 2008-08-20 18:37:15: Tylan poly is alarming for H2 in step 25 Message-ID: Checked system it has been in step 25 all morning no alarms From tberg at snf.stanford.edu Thu Aug 21 12:28:25 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Aug 2008 12:28:25 -0700 Subject: Comment tylanpoly SNF 2008-08-21 09:24:52: Getting fan for Replacement Message-ID: Replaced fan furnace is at temp From tberg at snf.stanford.edu Thu Aug 21 12:29:31 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Aug 2008 12:29:31 -0700 Subject: Comment tylanpoly SNF 2008-08-21 12:29:31: Temp looks OK Message-ID: will keep it in yellow for observation From huimei at snf.stanford.edu Thu Aug 21 19:03:08 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Thu, 21 Aug 2008 19:03:08 -0700 Subject: Problem tylanpoly SNF 2008-08-21 19:03:07: sth is wrong with digistal board Message-ID: it happens when push "manual","fast","out" board From huimei at snf.stanford.edu Thu Aug 21 19:04:27 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Thu, 21 Aug 2008 19:04:27 -0700 Subject: Comment tylanpoly SNF 2008-08-21 19:04:27: pls delete it, it's bpsg furnace Message-ID: From tberg at snf.stanford.edu Fri Aug 22 06:03:12 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 22 Aug 2008 06:03:12 -0700 Subject: Problem tylanpoly SNF 2008-08-21 19:03:07: sth is wrong with digistal board Message-ID: wrong tube From tberg at snf.stanford.edu Fri Aug 22 06:03:27 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 22 Aug 2008 06:03:27 -0700 Subject: Comment tylanpoly SNF 2008-08-21 19:04:27: pls delete it, it's bpsg furnace Message-ID: wrong tube From lindaw at snf.stanford.edu Sat Aug 23 16:11:37 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 23 Aug 2008 16:11:37 -0700 Subject: Problem tylanpoly SNF 2008-08-23 16:11:36: deposition visibly non-uniform Message-ID: 4 wafers plus monitor test wafer. middle boat. AMOR585, 24 min dep. The color of wafers visibly different from load to source. And on the monitor wafer, there is a visible color difference across the wafer. 5 measurement taken on test wafer. B = 1426A, C=1504A, T=1585A, R=1437A, L=1575A. Avg. 1505 +-74A. From lindaw at snf.stanford.edu Mon Aug 25 13:37:29 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 25 Aug 2008 13:37:29 -0700 Subject: Problem tylanpoly SNF 2008-08-25 13:37:29: The quartz baffle in the back of the furnace Message-ID: The quartz baffle at the back of the boat rail appears to be cracked and possibly broken. From ktorashima at snf.stanford.edu Tue Aug 26 01:32:49 2008 From: ktorashima at snf.stanford.edu (ktorashima at snf.stanford.edu) Date: Tue, 26 Aug 2008 01:32:49 -0700 Subject: Shutdown tylanpoly SNF 2008-08-26 01:32:48: the tube cannot come in Message-ID: The tube can come out but cannot come in. From lindaw at snf.stanford.edu Wed Aug 27 10:41:16 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 27 Aug 2008 10:41:16 -0700 Subject: Comment tylanpoly SNF 2008-08-27 10:41:15: status update? Message-ID: So, what is up with tylanpoly? Any idea how long it will be in shutdown? From seymour at snf.stanford.edu Wed Aug 27 10:56:52 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Aug 2008 10:56:52 -0700 Subject: Comment tylanpoly SNF 2008-08-27 10:56:52: Tylan Poly is heating up now. Message-ID: I replaced the broken back baffle and loader sheath. The tube pump port oring and t/c sheath orings were damaged over the weekend and i replaced them. The tube base and leak rate are good. When the tube heats up to about 550 I will start a coat recipe to cover replaced quartz. after that a test wil need to be done. From seymour at snf.stanford.edu Wed Aug 27 10:57:45 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Aug 2008 10:57:45 -0700 Subject: Shutdown tylanpoly SNF 2008-08-26 01:32:48: the tube cannot come in Message-ID: all problems with the tube have been addressed. It is heating up for a coat now. From seymour at snf.stanford.edu Wed Aug 27 11:00:14 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Aug 2008 11:00:14 -0700 Subject: Problem tylanpoly SNF 2008-08-27 11:00:13: tube will need a test Message-ID: I will stare polyemit for 45 mins as soon at the temp is up to coat the replaced quartz. after that a test is needed. From maurice at snf.stanford.edu Wed Aug 27 13:49:00 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 Aug 2008 13:49:00 -0700 Subject: Comment tylanpoly SNF 2008-08-27 13:49:00: running polyemit test Message-ID: From maurice at snf.stanford.edu Wed Aug 27 16:17:23 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 Aug 2008 16:17:23 -0700 Subject: Comment tylanpoly SNF 2008-08-27 10:41:15: status update? Message-ID: Poly is up From maurice at snf.stanford.edu Wed Aug 27 16:17:39 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 Aug 2008 16:17:39 -0700 Subject: Problem tylanpoly SNF 2008-08-25 13:37:29: The quartz baffle in the back of the furnace Message-ID: Baffle replaced From maurice at snf.stanford.edu Wed Aug 27 16:19:46 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 Aug 2008 16:19:46 -0700 Subject: Comment tylanpoly SNF 2008-08-27 13:49:00: running polyemit test Message-ID: Polyemit test 00:10:00 expected ~1100 c 1057 t 1072 b 1067 r 1068 l 1065 From maurice at snf.stanford.edu Wed Aug 27 16:19:59 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 Aug 2008 16:19:59 -0700 Subject: Problem tylanpoly SNF 2008-08-27 11:00:13: tube will need a test Message-ID: test complete Polyemit test 00:10:00 expected ~1100 c 1057 t 1072 b 1067 r 1068 l 1065 From maurice at snf.stanford.edu Wed Aug 27 16:20:13 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 Aug 2008 16:20:13 -0700 Subject: Comment tylanpoly SNF 2008-08-27 10:56:52: Tylan Poly is heating up now. Message-ID: test good From maurice at snf.stanford.edu Wed Aug 27 16:21:05 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 Aug 2008 16:21:05 -0700 Subject: Problem tylanpoly SNF 2008-08-23 16:11:36: deposition visibly non-uniform Message-ID: Test after baffle replaced Polyemit test 00:10:00 expected ~1100 c 1057 t 1072 b 1067 r 1068 l 1065 From tberg at snf.stanford.edu Fri Aug 29 06:15:07 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 29 Aug 2008 06:15:07 -0700 Subject: Problem tylanpoly SNF 2008-08-21 05:50:10: low temperature polyemit Message-ID: replaced scr fan temp ok From tberg at snf.stanford.edu Fri Aug 29 06:15:37 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 29 Aug 2008 06:15:37 -0700 Subject: Comment tylanpoly SNF 2008-08-21 12:29:31: Temp looks OK Message-ID: replaced scr fan