Problem tylanpoly SNF 2008-08-19 14:54:04: it show no SiH4 gas

huimei at snf.stanford.edu huimei at snf.stanford.edu
Tue Aug 19 14:54:05 PDT 2008

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my setting of deposition for SiH4 is 136, but in deposition, the SiH4 read 0

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