Problem tylanpoly SNF 2008-08-23 16:11:36: deposition visibly non-uniform

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat Aug 23 16:11:37 PDT 2008


4 wafers plus monitor test wafer. middle boat. AMOR585, 24 min dep. The color of wafers visibly different from load to source. And on the monitor wafer, there is a visible color difference across the wafer. 5 measurement taken on test wafer. B = 1426A, C=1504A, T=1585A, R=1437A, L=1575A.  Avg. 1505 +-74A.




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