Comment tylanpoly SNF 2008-09-02 12:35:14: AMOR585 visibly non-uniform

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Tue Sep 2 12:35:15 PDT 2008


I ran 24 min dep of AMOR585 yesterday (wafer flats up) and the wafers came out with visible nonuniformity.  Measured monitor wafer from top (flat) to bottom, right and left.  Top = 1767A  Center = 1677A  Bottom = 1568A  Right = 1629A  Left = 1704A   Avg and STD DEV  1669 +-75A




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