From seymour at snf.stanford.edu  Wed Apr 15 15:31:52 2009
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 15 Apr 2009 15:31:52 -0700
Subject: Comment tylanpoly SNF 2009-04-15 15:31:51: pump oil changed
Message-ID: <mailman.905.1356283797.5060.tylanpoly-pcs@snf.stanford.edu>




From rparsa at snf.stanford.edu  Fri Apr 17 15:29:56 2009
From: rparsa at snf.stanford.edu (rparsa at snf.stanford.edu)
Date: Fri, 17 Apr 2009 15:29:56 -0700
Subject: Comment tylanpoly SNF 2009-04-17 15:29:56: Non uniformity
Message-ID: <mailman.906.1356283797.5060.tylanpoly-pcs@snf.stanford.edu>

I targeted for a  5000A amorph. poly but ended up with thickness variation from 5000-7000A on my wafers.