From maurice at snf.stanford.edu Mon Jan 5 14:15:44 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 5 Jan 2009 14:15:44 -0800 Subject: Comment tylanpoly SNF 2009-01-05 14:15:43: Test after shutdown Message-ID: Ran Polyemit 00:10:00 expected 1200A Actual 1169 looks good From lindaw at snf.stanford.edu Tue Jan 13 13:23:06 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 13 Jan 2009 13:23:06 -0800 Subject: Problem tylanpoly SNF 2009-01-13 13:23:05: small "b" center and source TC's Message-ID: TempC and TempS reading small "b's" next to temp display, but temp look ok. Source a little high. From seymour at snf.stanford.edu Tue Jan 13 13:33:51 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 13 Jan 2009 13:33:51 -0800 Subject: Problem tylanpoly SNF 2009-01-13 13:23:05: small "b" center and source TC's Message-ID: unpluged and reinserted center and source spike t/c's. No more little b's From lindaw at snf.stanford.edu Tue Jan 13 14:31:27 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 13 Jan 2009 14:31:27 -0800 Subject: Problem tylanpoly SNF 2009-01-13 14:31:26: tube out, end of process MFS Alarm keeps going off Message-ID: While the tube was out and unloading wafers, MFS Alarm kept going off. alarm silence works only for about 2 min before next MFS Alarm. Program AMOR585. MFS alarm while boat going back in. Silenced alarm and run polypump. From seymour at snf.stanford.edu Tue Jan 13 15:21:56 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 13 Jan 2009 15:21:56 -0800 Subject: Problem tylanpoly SNF 2009-01-13 14:31:26: tube out, end of process MFS Alarm keeps going off Message-ID: No indication of whiich gas causing alarm so I check all zeros and adjusted where necessary. N2Purge was off negative by a few hundred mV. after adjusting I ran the auto zero routine. all gases reading zero with no flow. From shott at snf.stanford.edu Tue Jan 20 07:47:48 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:47:48 -0800 Subject: Comment tylanpoly SNF 2008-11-24 08:20:20: loader out, user not around Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:47:54 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:47:54 -0800 Subject: Comment tylanpoly SNF 2008-11-24 14:12:32: the rail sheath is peeling pretty badly Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:48:00 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:48:00 -0800 Subject: Comment tylanpoly SNF 2008-12-12 19:58:53: lots of flaking Message-ID: To the archives ...