Problem tylanpoly SNF 2009-01-13 14:31:26: tube out, end of process MFS Alarm keeps going off

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Tue Jan 13 14:31:27 PST 2009


While the tube was out and unloading wafers, MFS Alarm kept going off. alarm silence works only for about 2 min before next MFS Alarm.  Program AMOR585.  MFS alarm while boat going back in. Silenced alarm and run polypump.




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