From tberg at snf.stanford.edu Wed Jul 1 06:11:28 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 1 Jul 2009 06:11:28 -0700 Subject: Shutdown tylanpoly SNF 2009-07-01 06:11:27: pull and clean Message-ID: From seymour at snf.stanford.edu Thu Jul 2 10:46:29 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 2 Jul 2009 10:46:29 -0700 Subject: Shutdown tylanpoly SNF 2009-07-01 06:11:27: pull and clean Message-ID: pull and clean completed From seymour at snf.stanford.edu Thu Jul 2 10:46:46 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 2 Jul 2009 10:46:46 -0700 Subject: Problem tylanpoly SNF 2009-07-02 10:46:45: coating tube after clean Message-ID: From seymour at snf.stanford.edu Thu Jul 2 10:47:01 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 2 Jul 2009 10:47:01 -0700 Subject: Comment tylanpoly SNF 2009-04-15 15:31:51: pump oil changed Message-ID: noted From seymour at snf.stanford.edu Thu Jul 2 10:47:12 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 2 Jul 2009 10:47:12 -0700 Subject: Comment tylanpoly SNF 2009-05-01 15:07:28: oil change completed Message-ID: noted From seymour at snf.stanford.edu Thu Jul 2 10:47:26 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 2 Jul 2009 10:47:26 -0700 Subject: Comment tylanpoly SNF 2009-05-22 08:23:26: oil change completed Message-ID: noted From seymour at snf.stanford.edu Thu Jul 2 10:47:37 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 2 Jul 2009 10:47:37 -0700 Subject: Comment tylanpoly SNF 2009-06-05 14:59:51: changed pump oil Message-ID: noted From seymour at snf.stanford.edu Thu Jul 2 10:47:50 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 2 Jul 2009 10:47:50 -0700 Subject: Comment tylanpoly SNF 2009-06-12 14:45:22: oil change completed Message-ID: noted From seymour at snf.stanford.edu Thu Jul 2 11:19:11 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 2 Jul 2009 11:19:11 -0700 Subject: Comment tylanpoly SNF 2009-07-02 11:19:11: pump oil changed Message-ID: From maurice at snf.stanford.edu Thu Jul 2 17:02:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Jul 2009 17:02:25 -0700 Subject: Problem tylanpoly SNF 2009-07-02 10:46:45: coating tube after clean Message-ID: Test complete polyemit 00:10:00 expect~1200Ang actulal= 1243 From cmcg at snf.stanford.edu Fri Jul 3 10:16:25 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Fri, 3 Jul 2009 10:16:25 -0700 Subject: Comment tylanpoly SNF 2009-07-03 10:16:25: boat in and floppy wafers Message-ID: Process got stuck on the boat in Step. It didn't seem to trigger the in switch until I pushed in on the door a bit. Some MFS alarms went off, but stopped and the process ran fine after this. The wafer slots in the boat curretly in there are very wide, and the wafers flop around a lot. I balanced them as evenly as I could, but when they came out they were all leaning forward and backwards. A new boat with tighter wafer slots would help this. From lindaw at snf.stanford.edu Sat Jul 4 14:11:27 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 4 Jul 2009 14:11:27 -0700 Subject: Comment tylanpoly SNF 2009-07-04 14:11:26: need to push boat in to get door interlock Message-ID: After the boat automatically goes back into the tube, the door interlock light does not come on unless you manually push the boat all the way in. Once the door interlock light comes on on the front panel, then the process proceeds to next step. From lwchang at snf.stanford.edu Sat Jul 11 18:11:34 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Sat, 11 Jul 2009 18:11:34 -0700 Subject: Problem tylanpoly SNF 2009-07-11 18:11:33: quartz wand not working - the releasing knob is stuck Message-ID: From tberg at snf.stanford.edu Mon Jul 13 06:50:14 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Jul 2009 06:50:14 -0700 Subject: Problem tylanpoly SNF 2009-07-11 18:11:33: quartz wand not working - the releasing knob is stuck Message-ID: Replaced Wand From seymour at snf.stanford.edu Fri Jul 17 14:58:59 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Jul 2009 14:58:59 -0700 Subject: Problem tylanpoly SNF 2009-07-17 14:58:59: oil change change completed Message-ID: From tberg at snf.stanford.edu Mon Jul 20 06:12:18 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 20 Jul 2009 06:12:18 -0700 Subject: Problem tylanpoly SNF 2009-07-17 14:58:59: oil change change completed Message-ID: Noted From lindaw at snf.stanford.edu Thu Jul 30 10:41:53 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 30 Jul 2009 10:41:53 -0700 Subject: Comment tylanpoly SNF 2009-07-30 10:41:52: with 13 minutes left in 24 min dep amor585 Message-ID: The process pressure dropped off to 325 mT, the MFS alarm sounded, and then the pressure overcompensated back up to 500 mT before eventually stabilizing back to ~400 mT. Pressure seems normal now. This happened at aproximately 10:40 am.