From tberg at snf.stanford.edu Thu Oct 1 06:00:12 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Oct 2009 06:00:12 -0700 Subject: Shutdown tylanpoly SNF 2009-10-01 06:00:11: pull and clean Message-ID: From seymour at snf.stanford.edu Thu Oct 1 11:55:10 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 1 Oct 2009 11:55:10 -0700 Subject: Shutdown tylanpoly SNF 2009-10-01 06:00:11: pull and clean Message-ID: pull and clean completed. Tube is heating up for a coat then it will need a test. From seymour at snf.stanford.edu Thu Oct 1 11:55:29 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 1 Oct 2009 11:55:29 -0700 Subject: Problem tylanpoly SNF 2009-10-01 11:55:28: needs test after coat. Message-ID: From ludwig at snf.stanford.edu Thu Oct 1 17:32:13 2009 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Thu, 1 Oct 2009 17:32:13 -0700 Subject: Problem tylanpoly SNF 2009-10-01 17:32:13: cantilever scraping sound Message-ID: During the Test, while the the cantilever was going in, 1/2 stopped and could hear a scraping sound. I had to push it in, did not apply much pressure, then it started to go in again. During the "Base Pressure test",. the lowest value we got was 0.4, but only for a short time, then it jumped to 4.7 After the run, the cantilever went in, but the scaping sounds is still there From ludwig at snf.stanford.edu Thu Oct 1 17:33:08 2009 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Thu, 1 Oct 2009 17:33:08 -0700 Subject: Shutdown tylanpoly SNF 2009-10-01 17:33:07: scaping sound, cantilever Message-ID: From tberg at snf.stanford.edu Fri Oct 2 07:00:08 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 2 Oct 2009 07:00:08 -0700 Subject: Shutdown tylanpoly SNF 2009-10-01 17:33:07: scaping sound, cantilever Message-ID: Adjusted cantilever ran in and out no scraping From tberg at snf.stanford.edu Fri Oct 2 07:00:55 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 2 Oct 2009 07:00:55 -0700 Subject: Problem tylanpoly SNF 2009-10-01 17:32:13: cantilever scraping sound Message-ID: Adjusted cantilever ran in and out no scraping From latta at snf.stanford.edu Fri Oct 2 13:11:01 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Oct 2009 13:11:01 -0700 Subject: Comment tylanpoly SNF 2009-10-02 13:11:00: Qual after pull & clean Message-ID: POLYEMIT 00:15:00 (expect about 2000A) Front = 1843A, Std Dev = 61 Front Center = 2000A, Std Dev = 37 Back Center = 1966A, Std Dev = 13 Back = 1964A, Std Dev = 17 Average All = 1944A From latta at snf.stanford.edu Fri Oct 2 13:24:30 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Oct 2009 13:24:30 -0700 Subject: Problem tylanpoly SNF 2009-10-01 11:55:28: needs test after coat. Message-ID: quals run and posted in comments From latta at snf.stanford.edu Fri Oct 2 13:24:46 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Oct 2009 13:24:46 -0700 Subject: Comment tylanpoly SNF 2009-09-04 15:45:50: oil changed Message-ID: archived From latta at snf.stanford.edu Fri Oct 2 13:25:22 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Oct 2009 13:25:22 -0700 Subject: Comment tylanpoly SNF 2009-07-30 10:41:52: with 13 minutes left in 24 min dep amor585 Message-ID: Oh, I hope the pull & clean fixed this.... From lindaw at snf.stanford.edu Fri Oct 2 15:34:53 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 2 Oct 2009 15:34:53 -0700 Subject: Problem tylanpoly SNF 2009-10-02 15:34:51: boat in stops before fully into tube. Manual assist Message-ID: The boat stopped short of being fully in the tube. I had to manually push the cantiliver support to get the boat to fully load and the door interlock to come on. When gently assisting the boat to load, the motion was a bit jerky rather than smooth. Could the drive cable be loose? From lindaw at snf.stanford.edu Fri Oct 2 16:29:06 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:29:06 -0700 Subject: Problem tylanpoly SNF 2009-10-02 16:29:05: boat also need manual help out. Message-ID: From mtang at snf.stanford.edu Sun Oct 4 08:53:33 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 4 Oct 2009 08:53:33 -0700 Subject: Comment tylanpoly SNF 2009-10-04 08:53:33: Use with caution- boat & door problem Message-ID: As Linda and others noted, the boat and door need a little manual "help" to move. If you need to use the system, be aware of this, and make sure to help only gently to avoid damaging your run. Staff will follow up on Monday. From tberg at snf.stanford.edu Mon Oct 5 07:16:58 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Oct 2009 07:16:58 -0700 Subject: Shutdown tylanpoly SNF 2009-10-05 07:16:57: rail is galled Message-ID: From tberg at snf.stanford.edu Mon Oct 5 08:52:19 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Oct 2009 08:52:19 -0700 Subject: Shutdown tylanpoly SNF 2009-10-05 07:16:57: rail is galled Message-ID: Replaced bearing/flag rail it moves smoothly in and out. Will keep in yellow for observation From tberg at snf.stanford.edu Mon Oct 5 08:52:31 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Oct 2009 08:52:31 -0700 Subject: Problem tylanpoly SNF 2009-10-02 15:34:51: boat in stops before fully into tube. Manual assist Message-ID: Replaced bearing/flag rail it moves smoothly in and out. Will keep in yellow for observation From tberg at snf.stanford.edu Mon Oct 5 08:53:06 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Oct 2009 08:53:06 -0700 Subject: Problem tylanpoly SNF 2009-10-02 16:29:05: boat also need manual help out. Message-ID: Replaced bearing/flag rail it moves smoothly in and out. Will keep in yellow for observation From tberg at snf.stanford.edu Mon Oct 5 08:53:27 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Oct 2009 08:53:27 -0700 Subject: Comment tylanpoly SNF 2009-10-04 08:53:33: Use with caution- boat & door problem Message-ID: Replaced bearing/flag rail it moves smoothly in and out. Will keep in yellow for observation From tberg at snf.stanford.edu Mon Oct 5 08:53:45 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Oct 2009 08:53:45 -0700 Subject: Problem tylanpoly SNF 2009-10-05 08:53:45: Observing door operation Message-ID: From tberg at snf.stanford.edu Mon Oct 5 14:03:09 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:03:09 -0700 Subject: Comment tylanpoly SNF 2009-04-17 15:29:56: Non uniformity Message-ID: noted From tberg at snf.stanford.edu Mon Oct 5 14:03:24 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:03:24 -0700 Subject: Comment tylanpoly SNF 2009-07-03 10:16:25: boat in and floppy wafers Message-ID: noted From tberg at snf.stanford.edu Mon Oct 5 14:03:42 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:03:42 -0700 Subject: Comment tylanpoly SNF 2009-07-02 11:19:11: pump oil changed Message-ID: noted From nvgirish at snf.stanford.edu Mon Oct 5 23:57:47 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Mon, 5 Oct 2009 23:57:47 -0700 Subject: Problem tylanpoly SNF 2009-10-05 23:57:46: Boat out problem Message-ID: After running Polyemit recipe, tube did not come out during the boatout step (step 120). Had to abort the process & manually get the tube out. Recipe ran ok. From seymour at snf.stanford.edu Tue Oct 6 14:25:26 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 6 Oct 2009 14:25:26 -0700 Subject: Problem tylanpoly SNF 2009-10-05 23:57:46: Boat out problem Message-ID: aborted pump recipe. waited long enough for tube to vent. loaded poly emit and pushed run. Tube opened normally. From lindaw at snf.stanford.edu Wed Oct 7 13:21:20 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 7 Oct 2009 13:21:20 -0700 Subject: Problem tylanpoly SNF 2009-10-07 13:21:20: end of AMOR585 boat does not auto come out Message-ID: At the end of process AMOR585, the boat does not automatically come out. Have to manually pull boat out in step 125. When the alarm ack button is pushed 2x, the boat automatically goes back in as it always has after unloading wafers. This has happened on my last run as well. From seymour at snf.stanford.edu Thu Oct 8 14:55:58 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:55:58 -0700 Subject: Problem tylanpoly SNF 2009-10-07 13:21:20: end of AMOR585 boat does not auto come out Message-ID: ran amor585 and watched system at step 120 going to step 125. When step 125 reached loader started pull. When out I pushed alarm ack and loader started in. Loaded polypump and pushed run. Loader timed out and went to manual. System working normally at this time. From seymour at snf.stanford.edu Fri Oct 9 15:02:36 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Oct 2009 15:02:36 -0700 Subject: Comment tylanpoly SNF 2009-10-09 15:02:35: oil changed Message-ID: From tberg at snf.stanford.edu Mon Oct 12 06:40:08 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Oct 2009 06:40:08 -0700 Subject: Problem tylanpoly SNF 2009-10-05 08:53:45: Observing door operation Message-ID: Door seems to be working fine since loader board change From alsune at snf.stanford.edu Thu Oct 22 12:29:11 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Thu, 22 Oct 2009 12:29:11 -0700 Subject: Problem tylanpoly SNF 2009-10-22 12:29:10: latex glove stain on the tube shaft Message-ID: Accidently, touch a small portion of the latex glove to the tube shaft and itmelted, leaving a stain. Very sorry for the incident. From seymour at snf.stanford.edu Thu Oct 22 13:47:09 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 22 Oct 2009 13:47:09 -0700 Subject: Problem tylanpoly SNF 2009-10-22 12:29:10: latex glove stain on the tube shaft Message-ID: removed all traces of glove from loader rail and wiped it with IPA. From tberg at snf.stanford.edu Tue Oct 27 05:56:34 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Oct 2009 05:56:34 -0700 Subject: Shutdown tylanpoly SNF 2009-10-27 05:56:33: pull and clean Message-ID: From tberg at snf.stanford.edu Wed Oct 28 12:48:00 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 28 Oct 2009 12:48:00 -0700 Subject: Comment tylanpoly SNF 2009-10-28 12:47:59: Pull and clean completed Message-ID: Pull and clean completed. caoat done . Needs test From seymour at snf.stanford.edu Wed Oct 28 13:55:26 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 28 Oct 2009 13:55:26 -0700 Subject: Shutdown tylanpoly SNF 2009-10-27 05:56:33: pull and clean Message-ID: clean completed, tube coated From seymour at snf.stanford.edu Wed Oct 28 13:55:45 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 28 Oct 2009 13:55:45 -0700 Subject: Problem tylanpoly SNF 2009-10-28 13:55:45: needs test after pull and clean Message-ID: From latta at snf.stanford.edu Wed Oct 28 17:51:08 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Oct 2009 17:51:08 -0700 Subject: Comment tylanpoly SNF 2009-10-28 17:51:07: Qual after Pull&Clean Message-ID: POLYEMIT 00:15:00 50 wafer spread (expect about 2000A) Front = 1904A, Std Dev = 15 Front Center = 1939A, Std Dev = 16 Back Center = 1976A, Std Dev = 14 Back = 1991A, Std Dev = 21 Average All = 1953A Dep rate = 130A/min From latta at snf.stanford.edu Wed Oct 28 17:51:18 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Oct 2009 17:51:18 -0700 Subject: Comment tylanpoly SNF 2009-10-02 13:11:00: Qual after pull & clean Message-ID: archived From latta at snf.stanford.edu Wed Oct 28 17:51:29 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Oct 2009 17:51:29 -0700 Subject: Comment tylanpoly SNF 2009-10-28 12:47:59: Pull and clean completed Message-ID: archived From latta at snf.stanford.edu Wed Oct 28 17:51:51 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Oct 2009 17:51:51 -0700 Subject: Problem tylanpoly SNF 2009-10-28 13:55:45: needs test after pull and clean Message-ID: test very good- see comments From latta at snf.stanford.edu Wed Oct 28 17:52:09 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Oct 2009 17:52:09 -0700 Subject: Comment tylanpoly SNF 2009-10-09 15:02:35: oil changed Message-ID: archived From seymour at snf.stanford.edu Thu Oct 29 15:00:39 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 29 Oct 2009 15:00:39 -0700 Subject: Comment tylanpoly SNF 2009-10-29 15:00:38: oil changed Message-ID: